Journal Article

PUBDB-2015-02098

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png A compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines

Walter, P. (Corresponding Author)DESY* ; Dippel, A.-C.DESY* ; Pflaum, K. ; Wernecke, J.DESY* ; van den Hurk, J. ; Blume, J.DESY* ; Klemradt, U.>Extern*

2015
American Institute of Physics [S.l.]

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Please use a persistent id in citations: doi:10.1063/1.4918620

Abstract: In this work, we report on a highly variable, compact, and light high-vacuum sputter deposition unit designed for in situ experiments using synchrotron radiation facilities. The chamber can be mounted at various synchrotron beamlines for scattering experiments in grazing incidence geometry. The sample position and the large exit window allow to perform x-ray experiments up to large q values. The sputtering unit is easy to mount on existing experimental setups and can be remote-controlled. In this paper, we describe in detail the design and the performance of the new sputtering chamber and present the installation of the apparatus at different 3rd generation light sources. Furthermore, we describe the different measurement options and present some selected results. The unit has been successfully commissioned and is now available for users at PETRA III at DESY.

Note: (c) AIP Publishing LLC

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Contributing Institute(s):

1. Experimentebetreuung PETRA III (FS-PE)
2. DOOR-User (DOOR)

Research Program(s):

1. 6214 - Nanoscience and Materials for Information Technology (POF3-621) (POF3-621)
2. 6G3 - PETRA III (POF3-622) (POF3-622)

Experiment(s):

1. PETRA Beamline P02.1 (PETRA III)
2. PETRA Beamline P08 (PETRA III)
3. Measurement at external facility

Appears in the scientific report 2015

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Database coverage:
; ; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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