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@ARTICLE{Walter:220091,
      author       = {Walter, P. and Dippel, A.-C. and Pflaum, K. and Wernecke,
                      J. and van den Hurk, J. and Blume, J. and Klemradt, U.},
      title        = {{A} compact and low-weight sputtering unit for in situ
                      investigations of thin film growth at synchrotron radiation
                      beamlines},
      journal      = {Review of scientific instruments},
      volume       = {86},
      number       = {5},
      issn         = {1089-7623},
      address      = {[S.l.]},
      publisher    = {American Institute of Physics},
      reportid     = {PUBDB-2015-02098},
      pages        = {053906},
      year         = {2015},
      note         = {(c) AIP Publishing LLC},
      abstract     = {In this work, we report on a highly variable, compact, and
                      light high-vacuum sputter deposition unit designed for in
                      situ experiments using synchrotron radiation facilities. The
                      chamber can be mounted at various synchrotron beamlines for
                      scattering experiments in grazing incidence geometry. The
                      sample position and the large exit window allow to perform
                      x-ray experiments up to large q values. The sputtering unit
                      is easy to mount on existing experimental setups and can be
                      remote-controlled. In this paper, we describe in detail the
                      design and the performance of the new sputtering chamber and
                      present the installation of the apparatus at different 3rd
                      generation light sources. Furthermore, we describe the
                      different measurement options and present some selected
                      results. The unit has been successfully commissioned and is
                      now available for users at PETRA III at DESY.},
      cin          = {FS-PE / DOOR},
      ddc          = {530},
      cid          = {I:(DE-H253)FS-PE-20120731 / I:(DE-H253)HAS-User-20120731},
      pnm          = {6214 - Nanoscience and Materials for Information Technology
                      (POF3-621) / 6G3 - PETRA III (POF3-622)},
      pid          = {G:(DE-HGF)POF3-6214 / G:(DE-HGF)POF3-6G3},
      experiment   = {EXP:(DE-H253)P-P02.1-20150101 / EXP:(DE-H253)P-P08-20150101
                      / EXP:(DE-MLZ)External-20140101},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000355923700029},
      pubmed       = {pmid:26026535},
      doi          = {10.1063/1.4918620},
      url          = {https://bib-pubdb1.desy.de/record/220091},
}