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000220091 1001_ $$0P:(DE-H253)PIP1007684$$aWalter, P.$$b0$$eCorresponding Author$$udesy
000220091 245__ $$aA compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines
000220091 260__ $$a[S.l.]$$bAmerican Institute of Physics$$c2015
000220091 3367_ $$00$$2EndNote$$aJournal Article
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000220091 520__ $$aIn this work, we report on a highly variable, compact, and light high-vacuum sputter deposition unit designed for in situ experiments using synchrotron radiation facilities. The chamber can be mounted at various synchrotron beamlines for scattering experiments in grazing incidence geometry. The sample position and the large exit window allow to perform x-ray experiments up to large q values. The sputtering unit is easy to mount on existing experimental setups and can be remote-controlled. In this paper, we describe in detail the design and the performance of the new sputtering chamber and present the installation of the apparatus at different 3rd generation light sources. Furthermore, we describe the different measurement options and present some selected results. The unit has been successfully commissioned and is now available for users at PETRA III at DESY.
000220091 536__ $$0G:(DE-HGF)POF3-6214$$a6214 - Nanoscience and Materials for Information Technology (POF3-621)$$cPOF3-621$$fPOF III$$x0
000220091 536__ $$0G:(DE-HGF)POF3-6G3$$a6G3 - PETRA III (POF3-622)$$cPOF3-622$$fPOF III$$x1
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000220091 693__ $$0EXP:(DE-H253)P-P02.1-20150101$$1EXP:(DE-H253)PETRAIII-20150101$$6EXP:(DE-H253)P-P02.1-20150101$$aPETRA III$$fPETRA Beamline P02.1$$x0
000220091 693__ $$0EXP:(DE-H253)P-P08-20150101$$1EXP:(DE-H253)PETRAIII-20150101$$6EXP:(DE-H253)P-P08-20150101$$aPETRA III$$fPETRA Beamline P08$$x1
000220091 693__ $$0EXP:(DE-MLZ)External-20140101$$5EXP:(DE-MLZ)External-20140101$$eMeasurement at external facility$$x2
000220091 7001_ $$0P:(DE-H253)PIP1010723$$aDippel, A.-C.$$b1$$udesy
000220091 7001_ $$0P:(DE-H253)PIP1008605$$aPflaum, K.$$b2
000220091 7001_ $$0P:(DE-H253)PIP1018819$$aWernecke, J.$$b3$$udesy
000220091 7001_ $$00000-0001-7710-8325$$avan den Hurk, J.$$b4
000220091 7001_ $$0P:(DE-H253)PIP1002945$$aBlume, J.$$b5$$udesy
000220091 7001_ $$0P:(DE-H253)PIP1008035$$aKlemradt, U.$$b6
000220091 773__ $$0PERI:(DE-600)1472905-2$$a10.1063/1.4918620$$gVol. 86, no. 5, p. 053906 -$$n5$$p053906$$tReview of scientific instruments$$v86$$x1089-7623$$y2015
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