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| 001 | 220091 | ||
| 005 | 20250717105706.0 | ||
| 024 | 7 | _ | |a 10.1063/1.4918620 |2 doi |
| 024 | 7 | _ | |a 0034-6748 |2 ISSN |
| 024 | 7 | _ | |a 1089-7623 |2 ISSN |
| 024 | 7 | _ | |a WOS:000355923700029 |2 WOS |
| 024 | 7 | _ | |a pmid:26026535 |2 pmid |
| 024 | 7 | _ | |a altmetric:79370574 |2 altmetric |
| 024 | 7 | _ | |a openalex:W853886598 |2 openalex |
| 037 | _ | _ | |a PUBDB-2015-02098 |
| 082 | _ | _ | |a 530 |
| 100 | 1 | _ | |a Walter, P. |0 P:(DE-H253)PIP1007684 |b 0 |e Corresponding Author |u desy |
| 245 | _ | _ | |a A compact and low-weight sputtering unit for in situ investigations of thin film growth at synchrotron radiation beamlines |
| 260 | _ | _ | |a [S.l.] |c 2015 |b American Institute of Physics |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 336 | 7 | _ | |a article |2 DRIVER |
| 336 | 7 | _ | |a Journal Article |b journal |m journal |0 PUB:(DE-HGF)16 |s 1453123306_25312 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 500 | _ | _ | |a (c) AIP Publishing LLC |
| 520 | _ | _ | |a In this work, we report on a highly variable, compact, and light high-vacuum sputter deposition unit designed for in situ experiments using synchrotron radiation facilities. The chamber can be mounted at various synchrotron beamlines for scattering experiments in grazing incidence geometry. The sample position and the large exit window allow to perform x-ray experiments up to large q values. The sputtering unit is easy to mount on existing experimental setups and can be remote-controlled. In this paper, we describe in detail the design and the performance of the new sputtering chamber and present the installation of the apparatus at different 3rd generation light sources. Furthermore, we describe the different measurement options and present some selected results. The unit has been successfully commissioned and is now available for users at PETRA III at DESY. |
| 536 | _ | _ | |a 6214 - Nanoscience and Materials for Information Technology (POF3-621) |0 G:(DE-HGF)POF3-6214 |c POF3-621 |f POF III |x 0 |
| 536 | _ | _ | |a 6G3 - PETRA III (POF3-622) |0 G:(DE-HGF)POF3-6G3 |c POF3-622 |f POF III |x 1 |
| 588 | _ | _ | |a Dataset connected to CrossRef, bib-pubdb1.desy.de |
| 693 | _ | _ | |a PETRA III |f PETRA Beamline P02.1 |1 EXP:(DE-H253)PETRAIII-20150101 |0 EXP:(DE-H253)P-P02.1-20150101 |6 EXP:(DE-H253)P-P02.1-20150101 |x 0 |
| 693 | _ | _ | |a PETRA III |f PETRA Beamline P08 |1 EXP:(DE-H253)PETRAIII-20150101 |0 EXP:(DE-H253)P-P08-20150101 |6 EXP:(DE-H253)P-P08-20150101 |x 1 |
| 693 | _ | _ | |0 EXP:(DE-MLZ)External-20140101 |5 EXP:(DE-MLZ)External-20140101 |e Measurement at external facility |x 2 |
| 700 | 1 | _ | |a Dippel, A.-C. |0 P:(DE-H253)PIP1010723 |b 1 |u desy |
| 700 | 1 | _ | |a Pflaum, K. |0 P:(DE-H253)PIP1008605 |b 2 |
| 700 | 1 | _ | |a Wernecke, J. |0 P:(DE-H253)PIP1018819 |b 3 |u desy |
| 700 | 1 | _ | |a van den Hurk, J. |0 0000-0001-7710-8325 |b 4 |
| 700 | 1 | _ | |a Blume, J. |0 P:(DE-H253)PIP1002945 |b 5 |u desy |
| 700 | 1 | _ | |a Klemradt, U. |0 P:(DE-H253)PIP1008035 |b 6 |
| 773 | _ | _ | |a 10.1063/1.4918620 |g Vol. 86, no. 5, p. 053906 - |0 PERI:(DE-600)1472905-2 |n 5 |p 053906 |t Review of scientific instruments |v 86 |y 2015 |x 1089-7623 |
| 856 | 4 | _ | |u https://bib-pubdb1.desy.de/record/220091/files/1.4918620.pdf |y OpenAccess |
| 856 | 4 | _ | |u https://bib-pubdb1.desy.de/record/220091/files/1.4918620.gif?subformat=icon |x icon |y OpenAccess |
| 856 | 4 | _ | |u https://bib-pubdb1.desy.de/record/220091/files/1.4918620.jpg?subformat=icon-180 |x icon-180 |y OpenAccess |
| 856 | 4 | _ | |u https://bib-pubdb1.desy.de/record/220091/files/1.4918620.jpg?subformat=icon-700 |x icon-700 |y OpenAccess |
| 856 | 4 | _ | |u https://bib-pubdb1.desy.de/record/220091/files/1.4918620.pdf?subformat=pdfa |x pdfa |y OpenAccess |
| 909 | C | O | |o oai:bib-pubdb1.desy.de:220091 |p openaire |p open_access |p VDB |p driver |p dnbdelivery |
| 910 | 1 | _ | |a Deutsches Elektronen-Synchrotron |0 I:(DE-588b)2008985-5 |k DESY |b 0 |6 P:(DE-H253)PIP1007684 |
| 910 | 1 | _ | |a Deutsches Elektronen-Synchrotron |0 I:(DE-588b)2008985-5 |k DESY |b 1 |6 P:(DE-H253)PIP1010723 |
| 910 | 1 | _ | |a Deutsches Elektronen-Synchrotron |0 I:(DE-588b)2008985-5 |k DESY |b 3 |6 P:(DE-H253)PIP1018819 |
| 910 | 1 | _ | |a Deutsches Elektronen-Synchrotron |0 I:(DE-588b)2008985-5 |k DESY |b 5 |6 P:(DE-H253)PIP1002945 |
| 910 | 1 | _ | |a Externes Institut |0 I:(DE-HGF)0 |k >Extern |b 6 |6 P:(DE-H253)PIP1008035 |
| 913 | 0 | _ | |a DE-HGF |b Struktur der Materie |l Forschung mit Photonen, Neutronen und Ionen (PNI) |1 G:(DE-HGF)POF2-540 |0 G:(DE-HGF)POF2-54G14 |2 G:(DE-HGF)POF2-500 |v PETRA III |9 G:(DE-H253)POF2-P02.1-20140410 |x 0 |
| 913 | 0 | _ | |a DE-HGF |b Struktur der Materie |l Forschung mit Photonen, Neutronen und Ionen (PNI) |1 G:(DE-HGF)POF2-540 |0 G:(DE-HGF)POF2-54G14 |2 G:(DE-HGF)POF2-500 |v PETRA III |9 G:(DE-H253)POF2-P08-20130405 |x 1 |
| 913 | 0 | _ | |a DE-HGF |b Struktur der Materie |l Forschung mit Photonen, Neutronen und Ionen (PNI) |1 G:(DE-HGF)POF2-540 |0 G:(DE-HGF)POF2-544 |2 G:(DE-HGF)POF2-500 |v In-house Research with PNI |9 G:(DE-H253)POF2-Other-Beam-20130405 |x 2 |
| 913 | 1 | _ | |a DE-HGF |b Forschungsbereich Materie |l Von Materie zu Materialien und Leben |1 G:(DE-HGF)POF3-620 |0 G:(DE-HGF)POF3-621 |2 G:(DE-HGF)POF3-600 |v In-house research on the structure, dynamics and function of matter |9 G:(DE-HGF)POF3-6214 |x 0 |4 G:(DE-HGF)POF |3 G:(DE-HGF)POF3 |
| 913 | 1 | _ | |a DE-HGF |b Forschungsbereich Materie |l Von Materie zu Materialien und Leben |1 G:(DE-HGF)POF3-620 |0 G:(DE-HGF)POF3-622 |2 G:(DE-HGF)POF3-600 |v Facility topic: Research on Matter with Brilliant Light Sources |9 G:(DE-HGF)POF3-6G3 |x 1 |4 G:(DE-HGF)POF |3 G:(DE-HGF)POF3 |
| 914 | 1 | _ | |y 2015 |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)0300 |2 StatID |b Medline |
| 915 | _ | _ | |a JCR |0 StatID:(DE-HGF)0100 |2 StatID |b REV SCI INSTRUM : 2013 |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)0200 |2 StatID |b SCOPUS |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)0199 |2 StatID |b Thomson Reuters Master Journal List |
| 915 | _ | _ | |a WoS |0 StatID:(DE-HGF)0110 |2 StatID |b Science Citation Index |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)0150 |2 StatID |b Web of Science Core Collection |
| 915 | _ | _ | |a WoS |0 StatID:(DE-HGF)0111 |2 StatID |b Science Citation Index Expanded |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)1150 |2 StatID |b Current Contents - Physical, Chemical and Earth Sciences |
| 915 | _ | _ | |a DBCoverage |0 StatID:(DE-HGF)1160 |2 StatID |b Current Contents - Engineering, Computing and Technology |
| 915 | _ | _ | |a IF < 5 |0 StatID:(DE-HGF)9900 |2 StatID |
| 915 | _ | _ | |a OpenAccess |0 StatID:(DE-HGF)0510 |2 StatID |
| 920 | 1 | _ | |0 I:(DE-H253)FS-PE-20120731 |k FS-PE |l Experimentebetreuung PETRA III |x 0 |
| 920 | 1 | _ | |0 I:(DE-H253)HAS-User-20120731 |k DOOR |l DOOR-User |x 1 |
| 980 | _ | _ | |a journal |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a I:(DE-H253)FS-PE-20120731 |
| 980 | _ | _ | |a I:(DE-H253)HAS-User-20120731 |
| 980 | _ | _ | |a UNRESTRICTED |
| 980 | 1 | _ | |a FullTexts |
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