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Journal Article | PUBDB-2015-01185 |
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2014
Munksgaard
Copenhagen
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Please use a persistent id in citations: doi:10.1107/S1600576714016392
Abstract: X-ray reciprocal space mapping was used for quantitative investigation of porous layers in indium phosphide. A new theoretical model in the frame of the statistical dynamical theory for cylindrical pores was developed and applied for numerical data evaluation. The analysis of reciprocal space maps provided comprehensive information on a wide range of the porous layer parameters, for example, layer thickness and porosity, orientation, and correlation length of segmented pore structures. The results are in a good agreement with scanning electron microscopy data.
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