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000207202 1001_ $$0P:(DE-HGF)0$$aLomov, Andrey A.$$b0$$eCorresponding Author
000207202 245__ $$aHigh-Resolution Synchrotron Diffraction Study of Porous Buffer InP(001) Layers
000207202 260__ $$aCopenhagen$$bMunksgaard$$c2014
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000207202 500__ $$a(c) International Union of Crystallography, OA
000207202 520__ $$aX-ray reciprocal space mapping was used for quantitative investigation of porous layers in indium phosphide. A new theoretical model in the frame of the statistical dynamical theory for cylindrical pores was developed and applied for numerical data evaluation. The analysis of reciprocal space maps provided comprehensive information on a wide range of the porous layer parameters, for example, layer thickness and porosity, orientation, and correlation length of segmented pore structures. The results are in a good agreement with scanning electron microscopy data.
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000207202 7001_ $$0P:(DE-HGF)0$$aPunegov, Vasily I.$$b1
000207202 7001_ $$0P:(DE-HGF)0$$aNohavica, Dusan$$b2
000207202 7001_ $$0P:(DE-HGF)0$$aChuev, Mikhail A.$$b3
000207202 7001_ $$0P:(DE-HGF)0$$aVasiliev, Alexander L.$$b4
000207202 7001_ $$0P:(DE-H253)PIP1001864$$aNovikov, Dmitri$$b5$$udesy
000207202 773__ $$0PERI:(DE-600)2020879-0$$a10.1107/S1600576714016392$$gVol. 47, no. 5, p. 1614 - 1625$$n5$$p1614 - 1625$$tJournal of applied crystallography$$v47$$x1600-5767$$y2014
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