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001     207202
005     20250717112701.0
024 7 _ |a 10.1107/S1600576714016392
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024 7 _ |a 0021-8898
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024 7 _ |a 1600-5767
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100 1 _ |a Lomov, Andrey A.
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245 _ _ |a High-Resolution Synchrotron Diffraction Study of Porous Buffer InP(001) Layers
260 _ _ |a Copenhagen
|c 2014
|b Munksgaard
336 7 _ |a Journal Article
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336 7 _ |a ARTICLE
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500 _ _ |a (c) International Union of Crystallography, OA
520 _ _ |a X-ray reciprocal space mapping was used for quantitative investigation of porous layers in indium phosphide. A new theoretical model in the frame of the statistical dynamical theory for cylindrical pores was developed and applied for numerical data evaluation. The analysis of reciprocal space maps provided comprehensive information on a wide range of the porous layer parameters, for example, layer thickness and porosity, orientation, and correlation length of segmented pore structures. The results are in a good agreement with scanning electron microscopy data.
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700 1 _ |a Punegov, Vasily I.
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700 1 _ |a Nohavica, Dusan
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700 1 _ |a Chuev, Mikhail A.
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700 1 _ |a Vasiliev, Alexander L.
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700 1 _ |a Novikov, Dmitri
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773 _ _ |a 10.1107/S1600576714016392
|g Vol. 47, no. 5, p. 1614 - 1625
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|t Journal of applied crystallography
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910 1 _ |a Deutsches Elektronen-Synchrotron
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914 1 _ |y 2014
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