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Study of Relaxation of Strain in Patterned Structures using X-Ray Diffraction Technique
Rehman-Khan, A. ; Stangl, J. ; Bauer, G. ; Buca, D. ; Hollander, B. ; Trinkaus, H. ; Mantl, S. ; Loo, R. ; Caymax, M. ; DESY
2006
IOP Publishing
20063rd International SiGe Technology and Device Meeting, ISTDM 2006, PrincetonPrinceton, USA, 15 May 2006 - 17 May 20062006-05-152006-05-17
IOP Publishing (2006)2006
Contributing Institute(s):
- Experiments with synchrotron radiation (HASYLAB)
Research Program(s):
- DORIS Beamline D4 (POF1-550) (POF1-550)
- DORIS Beamline BW2 (POF1-550) (POF1-550)
- FS-Proposal: II-20032053 EC (II-20032053-EC) (II-20032053-EC)
Experiment(s):
- DORIS Beamline D4 (DORIS III)
- DORIS Beamline BW2 (DORIS III)
Appears in the scientific report
2006
Database coverage:No Author Disambiguation