Conference Presentation PHPPUBDB-853

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Study of Relaxation of Strain in Patterned Structures using X-Ray Diffraction Technique

 ;  ;  ;  ;  ;  ;  ;  ;  ; DESY

2006
IOP Publishing

3rd International SiGe Technology and Device Meeting, ISTDM 2006, PrincetonPrinceton, USA, 15 May 2006 - 17 May 20062006-05-152006-05-17 IOP Publishing ()  GO


Contributing Institute(s):
  1. Experiments with synchrotron radiation (HASYLAB)
Research Program(s):
  1. DORIS Beamline D4 (POF1-550) (POF1-550)
  2. DORIS Beamline BW2 (POF1-550) (POF1-550)
  3. FS-Proposal: II-20032053 EC (II-20032053-EC) (II-20032053-EC)
Experiment(s):
  1. DORIS Beamline D4 (DORIS III)
  2. DORIS Beamline BW2 (DORIS III)

Appears in the scientific report 2006
Database coverage:
No Author Disambiguation
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The record appears in these collections:
Private Collections > >DESY > >FS > HASYLAB(-2012)
Document types > Presentations > Conference Presentations
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 Record created 2012-09-17, last modified 2016-10-19



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