| Identifier | G:(DE-H253)II-20032053-EC |
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Journal Article
Study of Relaxation of Strain in Patterned Structures using X-Ray Diffraction Technique
Semiconductor science and technology 22, 1-4 (2006) [10.1088/0268-1242/22/1/S50]
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Conference Presentation
Study of Relaxation of Strain in Patterned Structures using X-Ray Diffraction Technique
3rd International SiGe Technology and Device Meeting, ISTDM 2006, PrincetonPrinceton, USA, 15 May 2006 - 17 May 2006
IOP Publishing (2006)
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