%0 Conference Paper
%A Rehman-Khan, A.
%A Stangl, J.
%A Bauer, G.
%A Buca, D.
%A Hollander, B.
%A Trinkaus, H.
%A Mantl, S.
%A Loo, R.
%A Caymax, M.
%A DESY
%T Study of Relaxation of Strain in Patterned Structures using X-Ray Diffraction Technique  
%I IOP Publishing
%M PHPPUBDB-853
%D 2006
%B 3rd International SiGe Technology and Device Meeting
%C 15 May 2006 - 17 May 2006, Princeton (USA)
Y2 15 May 2006 - 17 May 2006
M2 Princeton, USA
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://bib-pubdb1.desy.de/record/79273