TY  - CONF
AU  - Rehman-Khan, A.
AU  - Stangl, J.
AU  - Bauer, G.
AU  - Buca, D.
AU  - Hollander, B.
AU  - Trinkaus, H.
AU  - Mantl, S.
AU  - Loo, R.
AU  - Caymax, M.
AU  - DESY
TI  - Study of Relaxation of Strain in Patterned Structures using X-Ray Diffraction Technique  
PB  - IOP Publishing
M1  - PHPPUBDB-853
PY  - 2006
T2  - 3rd International SiGe Technology and Device Meeting
CY  - 15 May 2006 - 17 May 2006, Princeton (USA)
Y2  - 15 May 2006 - 17 May 2006
M2  - Princeton, USA
LB  - PUB:(DE-HGF)6
UR  - https://bib-pubdb1.desy.de/record/79273
ER  -