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@INPROCEEDINGS{RehmanKhan:79273,
author = {Rehman-Khan, A. and Stangl, J. and Bauer, G. and Buca, D.
and Hollander, B. and Trinkaus, H. and Mantl, S. and Loo, R.
and Caymax, M. and DESY},
title = {{S}tudy of {R}elaxation of {S}train in {P}atterned
{S}tructures using {X}-{R}ay {D}iffraction {T}echnique},
publisher = {IOP Publishing},
reportid = {PHPPUBDB-853},
year = {2006},
month = {May},
date = {2006-05-15},
organization = {3rd International SiGe Technology and
Device Meeting, Princeton (USA), 15 May
2006 - 17 May 2006},
cin = {HASYLAB},
cid = {$I:(DE-H253)HASYLAB_-2012_-20130307$},
pnm = {DORIS Beamline D4 (POF1-550) / DORIS Beamline BW2
(POF1-550) / FS-Proposal: II-20032053 EC (II-20032053-EC)},
pid = {G:(DE-H253)POF1-D4-20130405 / G:(DE-H253)POF1-BW2-20130405
/ G:(DE-H253)II-20032053-EC},
experiment = {EXP:(DE-H253)D-D4-20150101 / EXP:(DE-H253)D-BW2-20150101},
typ = {PUB:(DE-HGF)6},
url = {https://bib-pubdb1.desy.de/record/79273},
}