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| Journal Article | PUBDB-2025-00288 |
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2024
American Inst. of Physics
Melville, NY
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Please use a persistent id in citations: doi:10.1063/5.0239106 doi:10.3204/PUBDB-2025-00288
Abstract: We present a method for the additive fabrication of planar magnetic nanoarrays with minimal surface roughness. Synthesis is accomplished by combining electron-beam lithography, used to generate nanometric patterned masks, with ion implantation in thin films. By implanting $^{56}$Fe$^+$ ions, we are able to introduce magnetic functionality in a controlled manner into continuous Pd thin films, achieving 3D spatial resolution down to a few tens of nanometers. Our results demonstrate the application of this technique in fabricating square artificial spin ice lattices, which exhibit well-defined magnetization textures and interactions among the patterned magnetic elements.
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