%0 Journal Article
%A Vantaraki, Christina
%A Ström, Petter
%A Tran, Tuan T.
%A Grassi, Matías P.
%A Fevola, Giovanni
%A Foerster, Michael
%A Sadowski, Jerzy T.
%A Primetzhofer, Daniel
%A Kapaklis, Vassilios
%T Magnetic metamaterials by ion-implantation
%J Applied physics letters
%V 125
%N 20
%@ 0003-6951
%C Melville, NY
%I American Inst. of Physics
%M PUBDB-2025-00288
%P 202403
%D 2024
%X We present a method for the additive fabrication of planar magnetic nanoarrays with minimal surface roughness. Synthesis is accomplished by combining electron-beam lithography, used to generate nanometric patterned masks, with ion implantation in thin films. By implanting <sup>56</sup>Fe<sup>+</sup> ions, we are able to introduce magnetic functionality in a controlled manner into continuous Pd thin films, achieving 3D spatial resolution down to a few tens of nanometers. Our results demonstrate the application of this technique in fabricating square artificial spin ice lattices, which exhibit well-defined magnetization textures and interactions among the patterned magnetic elements. 
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001365411200004
%R 10.1063/5.0239106
%U https://bib-pubdb1.desy.de/record/622250