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100 1 _ |a Vantaraki, Christina
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245 _ _ |a Magnetic metamaterials by ion-implantation
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520 _ _ |a We present a method for the additive fabrication of planar magnetic nanoarrays with minimal surface roughness. Synthesis is accomplished by combining electron-beam lithography, used to generate nanometric patterned masks, with ion implantation in thin films. By implanting $^{56}$Fe$^+$ ions, we are able to introduce magnetic functionality in a controlled manner into continuous Pd thin films, achieving 3D spatial resolution down to a few tens of nanometers. Our results demonstrate the application of this technique in fabricating square artificial spin ice lattices, which exhibit well-defined magnetization textures and interactions among the patterned magnetic elements.
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700 1 _ |a Ström, Petter
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700 1 _ |a Tran, Tuan T.
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700 1 _ |a Grassi, Matías P.
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700 1 _ |a Fevola, Giovanni
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700 1 _ |a Foerster, Michael
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700 1 _ |a Sadowski, Jerzy T.
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700 1 _ |a Primetzhofer, Daniel
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700 1 _ |a Kapaklis, Vassilios
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