TY - JOUR AU - Vantaraki, Christina AU - Ström, Petter AU - Tran, Tuan T. AU - Grassi, Matías P. AU - Fevola, Giovanni AU - Foerster, Michael AU - Sadowski, Jerzy T. AU - Primetzhofer, Daniel AU - Kapaklis, Vassilios TI - Magnetic metamaterials by ion-implantation JO - Applied physics letters VL - 125 IS - 20 SN - 0003-6951 CY - Melville, NY PB - American Inst. of Physics M1 - PUBDB-2025-00288 SP - 202403 PY - 2024 AB - We present a method for the additive fabrication of planar magnetic nanoarrays with minimal surface roughness. Synthesis is accomplished by combining electron-beam lithography, used to generate nanometric patterned masks, with ion implantation in thin films. By implanting <sup>56</sup>Fe<sup>+</sup> ions, we are able to introduce magnetic functionality in a controlled manner into continuous Pd thin films, achieving 3D spatial resolution down to a few tens of nanometers. Our results demonstrate the application of this technique in fabricating square artificial spin ice lattices, which exhibit well-defined magnetization textures and interactions among the patterned magnetic elements. LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:001365411200004 DO - DOI:10.1063/5.0239106 UR - https://bib-pubdb1.desy.de/record/622250 ER -