Journal Article

PUBDB-2023-07132

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Wake-Up Free Ultrathin Ferroelectric Hf$_{0.5}$Zr$_{0.5}$O$_2$ Films

Chouprik, A. (Corresponding author)Extern* ; Mikheev, V.Extern* ; Korostylev, E. ; Kozodaev, M. ; Zarubin, S. ; Vinnik, D. ; Gudkova, S. ; Negrov, D.Extern*

2023
MDPI Basel

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Please use a persistent id in citations: doi:10.3390/nano13212825  doi:10.3204/PUBDB-2023-07132

Abstract: The development of the new generation of non-volatile high-density ferroelectric memory requires the utilization of ultrathin ferroelectric films. The most promising candidates are polycrystalline-doped HfO$_2$ films because of their perfect compatibility with silicon technology and excellent ferroelectric properties. However, the remanent polarization of HfO$_2$ films is known to degrade when their thickness is reduced to a few nanometers. One of the reasons for this phenomenon is the wake-up effect, which is more pronounced in the thinner the film. For the ultrathin HfO$_2$ films, it can be so long-lasting that degradation occurs even before the wake-up procedure is completed. In this work, an approach to suppress the wake-up in ultrathin Hf$_{0.5}$Zr$_{0.5}$O$_2$ films is elucidated. By engineering internal built-in fields in an as-prepared structure, a stable ferroelectricity without a wake-up effect is induced in 4.5 nm thick Hf$_{0.5}$Zr$_{0.5}$O$_2$ film. By analysis of the functional characteristics of ferroelectric structures with a different pattern of internal built-in fields and their comparison with the results of in situ piezoresponse force microscopy and synchrotron X-ray micro-diffraction, the important role of built-in fields in ferroelectricity of ultrathin Hf$_{0.5}$Zr$_{0.5}$O$_2$ films as well as the origin of stable ferroelectric properties is revealed.

Note: Russische Institute beteiligt!

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Contributing Institute(s):

1. DOOR-User (DOOR ; HAS-User)

Research Program(s):

1. 6G3 - PETRA III (DESY) (POF4-6G3) (POF4-6G3)
2. FS-Proposal: I-20190533 (I-20190533) (I-20190533)

Experiment(s):

1. PETRA Beamline P23 (PETRA III)

Appears in the scientific report 2023

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