TY  - JOUR
AU  - Chouprik, Anastasia
AU  - Mikheev, Vitalii
AU  - Korostylev, Evgeny
AU  - Kozodaev, Maxim
AU  - Zarubin, Sergey
AU  - Vinnik, Denis
AU  - Gudkova, Svetlana
AU  - Negrov, Dmitriy
TI  - Wake-Up Free Ultrathin Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Films
JO  - Nanomaterials
VL  - 13
IS  - 21
SN  - 2079-4991
CY  - Basel
PB  - MDPI
M1  - PUBDB-2023-07132
SP  - 2825 
PY  - 2023
N1  - Russische Institute beteiligt! 
AB  - The development of the new generation of non-volatile high-density ferroelectric memory requires the utilization of ultrathin ferroelectric films. The most promising candidates are polycrystalline-doped HfO<sub>2</sub> films because of their perfect compatibility with silicon technology and excellent ferroelectric properties. However, the remanent polarization of HfO<sub>2</sub> films is known to degrade when their thickness is reduced to a few nanometers. One of the reasons for this phenomenon is the wake-up effect, which is more pronounced in the thinner the film. For the ultrathin HfO<sub>2</sub> films, it can be so long-lasting that degradation occurs even before the wake-up procedure is completed. In this work, an approach to suppress the wake-up in ultrathin Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> films is elucidated. By engineering internal built-in fields in an as-prepared structure, a stable ferroelectricity without a wake-up effect is induced in 4.5 nm thick Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> film. By analysis of the functional characteristics of ferroelectric structures with a different pattern of internal built-in fields and their comparison with the results of in situ piezoresponse force microscopy and synchrotron X-ray micro-diffraction, the important role of built-in fields in ferroelectricity of ultrathin Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> films as well as the origin of stable ferroelectric properties is revealed.   
LB  - PUB:(DE-HGF)16
C6  - 37947671
UR  - <Go to ISI:>//WOS:001103267500001
DO  - DOI:10.3390/nano13212825
UR  - https://bib-pubdb1.desy.de/record/599054
ER  -