TY - JOUR
AU - Chouprik, Anastasia
AU - Mikheev, Vitalii
AU - Korostylev, Evgeny
AU - Kozodaev, Maxim
AU - Zarubin, Sergey
AU - Vinnik, Denis
AU - Gudkova, Svetlana
AU - Negrov, Dmitriy
TI - Wake-Up Free Ultrathin Ferroelectric Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Films
JO - Nanomaterials
VL - 13
IS - 21
SN - 2079-4991
CY - Basel
PB - MDPI
M1 - PUBDB-2023-07132
SP - 2825
PY - 2023
N1 - Russische Institute beteiligt!
AB - The development of the new generation of non-volatile high-density ferroelectric memory requires the utilization of ultrathin ferroelectric films. The most promising candidates are polycrystalline-doped HfO<sub>2</sub> films because of their perfect compatibility with silicon technology and excellent ferroelectric properties. However, the remanent polarization of HfO<sub>2</sub> films is known to degrade when their thickness is reduced to a few nanometers. One of the reasons for this phenomenon is the wake-up effect, which is more pronounced in the thinner the film. For the ultrathin HfO<sub>2</sub> films, it can be so long-lasting that degradation occurs even before the wake-up procedure is completed. In this work, an approach to suppress the wake-up in ultrathin Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> films is elucidated. By engineering internal built-in fields in an as-prepared structure, a stable ferroelectricity without a wake-up effect is induced in 4.5 nm thick Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> film. By analysis of the functional characteristics of ferroelectric structures with a different pattern of internal built-in fields and their comparison with the results of in situ piezoresponse force microscopy and synchrotron X-ray micro-diffraction, the important role of built-in fields in ferroelectricity of ultrathin Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> films as well as the origin of stable ferroelectric properties is revealed.
LB - PUB:(DE-HGF)16
C6 - 37947671
UR - <Go to ISI:>//WOS:001103267500001
DO - DOI:10.3390/nano13212825
UR - https://bib-pubdb1.desy.de/record/599054
ER -