Home > Publications database > Post deposition annealing of epitaxial $\mathrm{Ce_{1−x}Pr_{x}O_{2-\delta}}$ films grown on Si(111) |
Journal Article | PUBDB-2016-03811 |
; ; ; ; ;
2015
RSC Publ.
Cambridge
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Please use a persistent id in citations: doi:10.1039/C5CP01105A
Abstract: n this work the structural and morphological changes of Ce$_{1−x}$Pr$_{x}$O$_{2-\delta}$ (x= 0.20, 0.35 and 0.75) films grown on Si(111) due to post deposition annealing are investigated by low energy electron diffraction combined with a spot profile analysis. The surface of the oxide films exhibit mosaics with large terraces separated by monoatomic steps. It is shown that the Ce/Pr ratio and post deposition annealingtemperature can be used to tune the mosaic spread, terrace size and step height of the grains. The morphological changes are accompanied by a phase transition from a fluorite type lattice to a bixbyite structure. Furthermore, at high PDA temperatures a silicate formationvia a polycrystalline intermediate state is observed.
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