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Journal Article | PUBDB-2014-04168 |
; ; ; ; ; ;
2014
American Inst. of Physics
Melville, NY
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Please use a persistent id in citations: doi:10.1063/1.4870585
Abstract: It is shown that ultrathin, highly ordered, continuous films of cerium dioxide may be prepared on silicon following substrate prepassivation using an atomic layer of chlorine. The as-deposited, few-nanometer-thin Ce2O3 film may very effectively be converted at room temperature to almost fully oxidized CeO2 by simple exposure to air, as demonstrated by hard X-ray photoemission spectroscopy and X-ray diffraction. This post-oxidation process essentially results in a negligible loss in film crystallinity and interface abruptness.
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