Journal Article PUBDB-2014-04168

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Ultrathin, epitaxial cerium dioxide on silicon

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2014
American Inst. of Physics Melville, NY

Applied physics letters 104(13), 131604 () [10.1063/1.4870585]
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Abstract: It is shown that ultrathin, highly ordered, continuous films of cerium dioxide may be prepared on silicon following substrate prepassivation using an atomic layer of chlorine. The as-deposited, few-nanometer-thin Ce2O3 film may very effectively be converted at room temperature to almost fully oxidized CeO2 by simple exposure to air, as demonstrated by hard X-ray photoemission spectroscopy and X-ray diffraction. This post-oxidation process essentially results in a negligible loss in film crystallinity and interface abruptness.

Classification:

Contributing Institute(s):
  1. DOOR-User (DOOR)
Research Program(s):
  1. DORIS Beamline BW1 (POF2-54G13) (POF2-54G13)
  2. DORIS Beamline BW2 (POF2-54G13) (POF2-54G13)
Experiment(s):
  1. DORIS Beamline BW1 (DORIS III)
  2. DORIS Beamline BW2 (DORIS III)

Appears in the scientific report 2014
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Medline ; American Institute of Physics web posting guidelines ; OpenAccess ; Current Contents - Physical, Chemical and Earth Sciences ; IF < 5 ; JCR ; NationallizenzNationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection
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 Record created 2014-11-21, last modified 2025-07-17


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