TY - JOUR AU - Flege, Jan Ingo AU - Kaemena, Björn AU - Höcker, Jan AU - Bertram, Florian AU - Wollschläger, Joachim AU - Schmidt, Thomas AU - Falta, Jens TI - Ultrathin, epitaxial cerium dioxide on silicon JO - Applied physics letters VL - 104 IS - 13 SN - 1077-3118 CY - Melville, NY PB - American Inst. of Physics M1 - PUBDB-2014-04168 SP - 131604 PY - 2014 AB - It is shown that ultrathin, highly ordered, continuous films of cerium dioxide may be prepared on silicon following substrate prepassivation using an atomic layer of chlorine. The as-deposited, few-nanometer-thin Ce2O3 film may very effectively be converted at room temperature to almost fully oxidized CeO2 by simple exposure to air, as demonstrated by hard X-ray photoemission spectroscopy and X-ray diffraction. This post-oxidation process essentially results in a negligible loss in film crystallinity and interface abruptness. LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:000334408500016 DO - DOI:10.1063/1.4870585 UR - https://bib-pubdb1.desy.de/record/192586 ER -