Journal Article

PUBDB-2025-00319

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Challenges and solutions in RF sputtering of superconducting Nb for nanostructuring processes

Strenzke, V. (Corresponding author)Extern* ; Weber, A. ; Heydolph, P. ; Moch, I. ; González Díaz-Palacio, I. ; Hillert, W. ; Zierold, R. ; Tiemann, L. ; Blick, R.Extern*DESY*

2024
American Inst. of Physics Melville, NY

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Please use a persistent id in citations: doi:10.1063/5.0239203  doi:10.3204/PUBDB-2025-00319

Abstract: The growing interest in hybrid devices that combine two-dimensional materials with a superconductor presents new challenges in material deposition. In this study, we demonstrate that achieving excellent superconducting properties by RF (radio frequency) sputtering does not require access to a high-end system but rather depends on the precise control of sputtering parameters and the selection of an appropriate lithographic process. We highlight the challenges and present practical solutions to deposit high-quality niobium thin films for the lithographic production of superconducting hybrid nanostructures. The influence of various deposition parameters, such as power, argon pressure, and film thickness, on the resultant superconducting characteristics can already be deduced at liquid nitrogen temperatures. Furthermore, niobium films tend to degrade when a PMMA [poly(methylmethacrylate)] resist is employed in the fabrication of superconducting nanostructures. We propose alternative and simple strategies to address this issue, which ultimately result in the restoration of the thin-film quality.

Note: Deutsche Forschungsgemeinschaft (DFG) with Grant No. BL-487/14-1

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Contributing Institute(s):

1. FS-Photon Science (FS-PS)

Research Program(s):

1. 632 - Materials – Quantum, Complex and Functional Materials (POF4-632) (POF4-632)
2. 05K22GUD - Verbundprojekt 05K2022 - NOVALIS: Innovative Beschleunigertechnologien für effiziente Strahlungsquellen. Teilprojekt 1. (BMBF-05K22GUD) (BMBF-05K22GUD)

Experiment(s):

1. No specific instrument

Appears in the scientific report 2024

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Database coverage:
; ; ; Clarivate Analytics Master Journal List ; Current Contents - Electronics and Telecommunications Collection ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; Essential Science Indicators ; IF < 5 ; JCR ; National-Konsortium ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection

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