TY  - JOUR
AU  - Strenzke, Vincent
AU  - Weber, Annika
AU  - Heydolph, Peer
AU  - Moch, Isa
AU  - González Díaz-Palacio, Isabel
AU  - Hillert, Wolfgang
AU  - Zierold, Robert
AU  - Tiemann, Lars
AU  - Blick, Robert
TI  - Challenges and solutions in RF sputtering of superconducting Nb for nanostructuring processes
JO  - Journal of applied physics
VL  - 136
IS  - 20
SN  - 0021-8979
CY  - Melville, NY
PB  - American Inst. of Physics
M1  - PUBDB-2025-00319
SP  - 205301
PY  - 2024
N1  - Deutsche Forschungsgemeinschaft (DFG) with Grant No. BL-487/14-1 
AB  - The growing interest in hybrid devices that combine two-dimensional materials with a superconductor presents new challenges in material deposition. In this study, we demonstrate that achieving excellent superconducting properties by RF (radio frequency) sputtering does not require access to a high-end system but rather depends on the precise control of sputtering parameters and the selection of an appropriate lithographic process. We highlight the challenges and present practical solutions to deposit high-quality niobium thin films for the lithographic production of superconducting hybrid nanostructures. The influence of various deposition parameters, such as power, argon pressure, and film thickness, on the resultant superconducting characteristics can already be deduced at liquid nitrogen temperatures. Furthermore, niobium films tend to degrade when a PMMA [poly(methylmethacrylate)] resist is employed in the fabrication of superconducting nanostructures. We propose alternative and simple strategies to address this issue, which ultimately result in the restoration of the thin-film quality. 
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001363273600012
DO  - DOI:10.1063/5.0239203
UR  - https://bib-pubdb1.desy.de/record/622281
ER  -