Journal Article

PUBDB-2021-00626

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range

Li, L. ; Koliyadu, J. C. P. ; Donnelly, H. ; Alj, D. ; Delmas, O. ; Ruiz Lopez, M.DESY* ; de La Rochefoucauld, O. ; Dovillaire, G. ; Fajardo, M. ; Zhou, C. ; Ruan, S. ; Dromey, B. ; Zepf, M. ; zeitoun, p. (Corresponding author)Extern*

2020
Soc. Washington, DC

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Please use a persistent id in citations: doi:10.1364/OL.396356

Abstract: We present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond 𝜆/39 root mean square (rms) at 𝜆=32nm. The sensor is suitable for wave front measurement in the 10 nm to 45 nm spectral regime. This compact wave front sensor is high-vacuum compatible and designed for in situ operations, allowing wide applications for up-to-date EUV sources or high-NA EUV optics.

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Contributing Institute(s):

1. FLASH Photonen-Strahlführungen und Optiken (FS-FLASH-B)

Research Program(s):

1. 6211 - Extreme States of Matter: From Cold Ions to Hot Plasmas (POF3-621) (POF3-621)

Experiment(s):

1. No specific instrument

Appears in the scientific report 2020

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Database coverage:
; Clarivate Analytics Master Journal List ; Current Contents - Electronics and Telecommunications Collection ; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; Essential Science Indicators ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection

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