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000454624 1001_ $$aLi, Lu$$b0
000454624 245__ $$aHigh numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range
000454624 260__ $$aWashington, DC$$bSoc.$$c2020
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000454624 520__ $$aWe present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond 
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000454624 7001_ $$aKoliyadu, Jayanath C. P.$$b1
000454624 7001_ $$aDonnelly, Hannah$$b2
000454624 7001_ $$aAlj, Domenico$$b3
000454624 7001_ $$aDelmas, Olivier$$b4
000454624 7001_ $$0P:(DE-H253)PIP1032913$$aRuiz Lopez, Mabel$$b5
000454624 7001_ $$ade La Rochefoucauld, Ombeline$$b6
000454624 7001_ $$aDovillaire, Guillaume$$b7
000454624 7001_ $$aFajardo, Marta$$b8
000454624 7001_ $$aZhou, Cangtao$$b9
000454624 7001_ $$aRuan, Shuangchen$$b10
000454624 7001_ $$aDromey, Brendan$$b11
000454624 7001_ $$aZepf, Matt$$b12
000454624 7001_ $$0P:(DE-H253)PIP1018070$$azeitoun, philippe$$b13$$eCorresponding author
000454624 773__ $$0PERI:(DE-600)1479014-2$$a10.1364/OL.396356$$gVol. 45, no. 15, p. 4248 -$$n15$$p4248$$tOptics letters$$v45$$x1539-4794$$y2020
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