TY  - JOUR
AU  - Li, Lu
AU  - Koliyadu, Jayanath C. P.
AU  - Donnelly, Hannah
AU  - Alj, Domenico
AU  - Delmas, Olivier
AU  - Ruiz Lopez, Mabel
AU  - de La Rochefoucauld, Ombeline
AU  - Dovillaire, Guillaume
AU  - Fajardo, Marta
AU  - Zhou, Cangtao
AU  - Ruan, Shuangchen
AU  - Dromey, Brendan
AU  - Zepf, Matt
AU  - zeitoun, philippe
TI  - High numerical aperture Hartmann wave front sensor for extreme ultraviolet spectral range
JO  - Optics letters
VL  - 45
IS  - 15
SN  - 1539-4794
CY  - Washington, DC
PB  - Soc.
M1  - PUBDB-2021-00626
SP  - 4248
PY  - 2020
N1  - Waiting for fulltext
AB  - We present a novel, to the best of our knowledge, Hartmann wave front sensor for extreme ultraviolet (EUV) spectral range with a numerical aperture (NA) of 0.15. The sensor has been calibrated using an EUV radiation source based on gas high harmonic generation. The calibration, together with simulation results, shows an accuracy beyond 𝜆/39 root mean square (rms) at 𝜆=32nm. The sensor is suitable for wave front measurement in the 10 nm to 45 nm spectral regime. This compact wave front sensor is high-vacuum compatible and designed for in situ operations, allowing wide applications for up-to-date EUV sources or high-NA EUV optics.
LB  - PUB:(DE-HGF)16
C6  - pmid:32735269
UR  - <Go to ISI:>//WOS:000564876000036
DO  - DOI:10.1364/OL.396356
UR  - https://bib-pubdb1.desy.de/record/454624
ER  -