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@ARTICLE{Li:454624,
author = {Li, Lu and Koliyadu, Jayanath C. P. and Donnelly, Hannah
and Alj, Domenico and Delmas, Olivier and Ruiz Lopez, Mabel
and de La Rochefoucauld, Ombeline and Dovillaire, Guillaume
and Fajardo, Marta and Zhou, Cangtao and Ruan, Shuangchen
and Dromey, Brendan and Zepf, Matt and zeitoun, philippe},
title = {{H}igh numerical aperture {H}artmann wave front sensor for
extreme ultraviolet spectral range},
journal = {Optics letters},
volume = {45},
number = {15},
issn = {1539-4794},
address = {Washington, DC},
publisher = {Soc.},
reportid = {PUBDB-2021-00626},
pages = {4248},
year = {2020},
note = {Waiting for fulltext},
abstract = {We present a novel, to the best of our knowledge, Hartmann
wave front sensor for extreme ultraviolet (EUV) spectral
range with a numerical aperture (NA) of 0.15. The sensor has
been calibrated using an EUV radiation source based on gas
high harmonic generation. The calibration, together with
simulation results, shows an accuracy beyond 𝜆/39 root
mean square (rms) at 𝜆=32nm. The sensor is suitable for
wave front measurement in the 10 nm to 45 nm spectral
regime. This compact wave front sensor is high-vacuum
compatible and designed for in situ operations, allowing
wide applications for up-to-date EUV sources or high-NA EUV
optics.},
cin = {FS-FLASH-B},
ddc = {530},
cid = {I:(DE-H253)FS-FLASH-B-20160930},
pnm = {6211 - Extreme States of Matter: From Cold Ions to Hot
Plasmas (POF3-621)},
pid = {G:(DE-HGF)POF3-6211},
experiment = {EXP:(DE-MLZ)NOSPEC-20140101},
typ = {PUB:(DE-HGF)16},
pubmed = {pmid:32735269},
UT = {WOS:000564876000036},
doi = {10.1364/OL.396356},
url = {https://bib-pubdb1.desy.de/record/454624},
}