Journal Article

PUBDB-2019-03805

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png An integrated cleanroom process for the vapor-phase deposition of large-area zeolitic imidazolate framework thin films

Cruz, A. J. (First author)Extern* ; Stassen, I. ; Krishtab, M. ; Marcoen, K. ; Stassin, T.Extern* ; Rodríguez-Hermida, S. ; Teyssandier, J. ; Pletincx, S. ; Verbeke, R. ; Rubio-Giménez, V. ; Tatay, S. ; Marti-Gastaldo, C.Extern* ; Meersschaut, J. ; Vereecken, P. M. ; De Feyter, S. ; Hauffman, T. ; Ameloot, R. (Corresponding author)Extern*

2019
American Chemical Society Washington, DC

This record in other databases:      

Please use a persistent id in citations: doi:10.1021/acs.chemmater.9b03435  doi:10.3204/PUBDB-2019-03805

Abstract: Robust and scalable thin film deposition methods are key to realize the potential of metal-organic frameworks (MOFs) in electronic devices. Here, we report the first integration of the chemical vapor deposition (CVD) of MOF coatings in a custom reactor within a cleanroom setting. As a test case, the MOF-CVD conditions for ZIF-8 are optimized to enable smooth, pinhole-free, and uniform thin films on full 200 mm wafers under mild conditions. The single-chamber MOF-CVD process and the impact of the deposition parameters are elucidated via a combination of in situ monitoring and ex situ characterization. The resulting process guidelines will pave the way for new MOF-CVD formulations and a plethora of MOF-based devices.

Note: © American Chemical Society

---

Contributing Institute(s):

1. PETRA III (PETRA III)

Research Program(s):

1. 6G3 - PETRA III (POF3-622) (POF3-622)
2. FS-Proposal: I-20180033 EC (I-20180033-EC) (I-20180033-EC)
3. FS-Proposal: I-20190028 (I-20190028) (I-20190028)
4. CALIPSOplus - Convenient Access to Light Sources Open to Innovation, Science and to the World (730872) (730872)

Experiment(s):

1. PETRA Beamline P02.1 (PETRA III)

Appears in the scientific report 2019

---

Database coverage:
; ; Clarivate Analytics Master Journal List ; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; IF >= 5 ; JCR ; Nationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Web of Science Core Collection

---