Journal Article

PUBDB-2026-00301

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png High-speed x-ray reflectometry for characterization of thin film growth at high deposition rates

Schumi-Mareček, D. ; Nelson, A. ; Pfeiler, E.Extern* ; Eder, M.Extern* ; Bertram, F.DESY* ; Kowarik, S. (Corresponding author)Extern*

2025
Inst. Woodbury, NY

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Please use a persistent id in citations: doi:10.1103/xxx9-8tk2  doi:10.3204/PUBDB-2026-00301

Abstract: We present a high-throughput, real-time study of PTCDI-C8thin film growth using quick x-ray reflectivity (qXRR) with 12 ms time resolution, combined with machine learning-based analysis. In situ qXRR enables monitoring of vacuum deposition at growth rates from 1 to 30Å/s, accessing a previously unexplored regime in molecular beam deposition. To efficiently analyze the resulting ∼20000reflectivity curves, we employ a convolutional neural network trained on a physics-informed multilayer model. This approach robustly extracts key structural parameters—including thickness, roughness, and crystalline versus amorphous content—from noisy data. We quantify interface roughness as a function of both film thickness and growth rate, identifying rapid roughening with a scaling exponent of 𝛽=0.62with film thickness and a secondary scaling exponent of 𝛾=0.21with growth rate. Additionally, we observe a reduction in the coherently ordered film thickness and a rise in amorphous content at higher deposition rates. These results demonstrate that combining qXRR with machine learning provides quantitative access to fast kinetic growth processes, offering a powerful tool for in situ characterization and morphological control in organic thin film fabrication.

Note: cc-by

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Contributing Institute(s):

1. DOOR-User (DOOR ; HAS-User)
2. PETRA-D (FS-PETRA-D)

Research Program(s):

1. 631 - Matter – Dynamics, Mechanisms and Control (POF4-631) (POF4-631)
2. 6G3 - PETRA III (DESY) (POF4-6G3) (POF4-6G3)

Experiment(s):

1. PETRA Beamline P08 (PETRA III)

Appears in the scientific report 2025

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Database coverage:
; ; ; Clarivate Analytics Master Journal List ; Current Contents - Electronics and Telecommunications Collection ; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; Essential Science Indicators ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection

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