Journal Article

PUBDB-2025-00416

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Octave-spanning supercontinuum generation in a CMOS-compatible thin Si$_3$N$_4$ waveguide coated with highly nonlinear TeO$_2$

Mbonde, H. (Corresponding author)Extern* ; Singh, N. K.CFEL*DESY* ; Segat Frare, B. L. ; Sinobad, M.CFEL*Extern* ; Ahmadi, P. T. ; Hashemi, B. ; Bonneville, D. B. ; Mascher, P. ; Kärtner, F. X.CFEL*XFEL.EU*DESY* ; Bradley, J. D. B.

2024
Soc. Washington, DC

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Please use a persistent id in citations: doi:10.1364/OL.503820

Abstract: Supercontinuum generation (SCG) is an important nonlinear optical process enabling broadband light sources for many applications, for which silicon nitride (Si3N4) has emerged as a leading on-chip platform. To achieve suitable group velocity dispersion and high confinement for broadband SCG the Si$_3$N$_4$ waveguide layer used is typically thick (>∼700 nm), which can lead to high stress and cracks unless specialized processing steps are used. Here, we report on efficient octave-spanning SCG in a thinner moderate-confinement 400-nm Si$_3$N$_4$ platform using a highly nonlinear tellurium oxide (TeO$_2$) coating. An octave supercontinuum spanning from 0.89 to 2.11 µm is achieved at a low peak power of 258 W using a 100-fs laser centered at 1565 nm. Our numerical simulations agree well with the experimental results giving a nonlinear parameter of 2.5 ± 0.5 W$^{−1}$m$^{−1}$, an increase by a factor of 2.5, when coating the Si$_3$N$_4$ waveguide with a TeO$_2$ film. This work demonstrates highly efficient SCG via effective dispersion engineering and an enhanced nonlinearity in CMOS-compatible hybrid TeO$_2$–Si$_3$N$_4$ waveguides and a promising route to monolithically integrated nonlinear, linear, and active functionalities on a single silicon photonic chip.

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Contributing Institute(s):

1. Ultrafast Lasers & X-rays Division (FS-CFEL-2)

Research Program(s):

1. 631 - Matter – Dynamics, Mechanisms and Control (POF4-631) (POF4-631)
2. femto-iCOMB - Integrated femtosecond laser based frequency comb and photonic microwave oscillator (101159229) (101159229)
3. FEMTOCHIP - FEMTOSECOND LASER ON A CHIP (965124) (965124)

Experiment(s):

1. Experiments at CFEL

Appears in the scientific report 2024

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Database coverage:
; Clarivate Analytics Master Journal List ; Current Contents - Electronics and Telecommunications Collection ; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; Essential Science Indicators ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection

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