Journal Article

PUBDB-2017-12451

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png X-ray focusing with efficient high-NA multilayer Laue lenses

Bajt, S. (Corresponding author)CFEL*DESY* ; Prasciolu, M.CFEL*DESY* ; Fleckenstein, H.CFEL*DESY* ; Domaracký, M.CFEL*DESY* ; Chapman, H. N.CFEL*DESY* ; Morgan, A.CFEL*DESY* ; Yefanov, O.CFEL*EMBL*DESY* ; Messerschmidt, M. ; Du, Y.CFEL* ; Murray, K.CFEL*DESY* ; Mariani, V.CFEL*DESY* ; Kuhn, M.CFEL*DESY* ; Aplin, S.CFEL*DESY* ; Pande, K.CFEL* ; Villanueva-Perez, P.CFEL*DESY* ; Stachnik, K.DESY* ; Chen, J. P. ; Andrejczuk, A. ; Meents, A.CFEL*DESY* ; Burkhardt, A.DESY* ; Pennicard, D.CFEL*DESY* ; Huang, X. ; Yan, H. ; Nazaretski, E. ; Chu, Y. S. ; Hamm, C. E.

2018
Nature Publishing Group London

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Please use a persistent id in citations: doi:10.1038/lsa.2017.162  doi:10.3204/PUBDB-2017-12451

Abstract: Multilayer Laue lenses are volume diffraction elements for the efficient focusing of X-rays. With a new manufacturing technique that we introduced, it is possible to fabricate lenses of sufficiently high numerical aperture (NA) to achieve focal spot sizes below 10 nm. The alternating layers of the materials that form the lens must span a broad range of thicknesses on the nan- ometer scale to achieve the necessary range of X-ray deflection angles required to achieve a high NA. This poses a challenge to both the accuracy of the deposition process and the control of the materials properties, which often vary with layer thickness. We introduced a new pair of materials—tungsten carbide and silicon carbide—to prepare layered structures with smooth and sharp interfaces and with no material phase transitions that hampered the manufacture of previous lenses. Using a pair of multi- layer Laue lenses (MLLs) fabricated from this system, we achieved a two-dimensional focus of 8.4 × 6.8 nm$^2$ at a photon energy of 16.3 keV with high diffraction efficiency and demonstrated scanning-based imaging of samples with a resolution well below 10 nm. The high NA also allowed projection holographic imaging with strong phase contrast over a large range of magnifications. An error analysis indicates the possibility of achieving 1 nm focusing.

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Contributing Institute(s):

1. FS-Arbeitsgruppe (FS-ML)
2. FS-CFEL-1 (Group Leader: Henry Chapman) (CFEL-I)
3. FS-Detektor Systeme (FS-DS)
4. Experimentebetreuung PETRA III (FS-PE)

Research Program(s):

1. 6214 - Nanoscience and Materials for Information Technology (POF3-621) (POF3-621)
2. 6G3 - PETRA III (POF3-622) (POF3-622)

Experiment(s):

1. PETRA Beamline P11 (PETRA III)
2. Measurement at external facility

Appears in the scientific report 2018

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Database coverage:
; ; ; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; DOAJ Seal ; IF >= 10 ; JCR ; SCOPUS ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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