Journal Article

PUBDB-2017-01428

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Study of pattern transition in nanopatterned Si(100) produced by impurity-assisted low-energy ion-beam erosion

Koyiloth Vayalil, S. (Corresponding author)Extern* ; Gupta, A.Extern* ; Roth, S. V.DESY*

2017
Springer Berlin

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Please use a persistent id in citations: doi:10.1007/s00339-017-0756-1

Abstract: In this work, formation of self-organized Si nanostructures induced by pure Fe incorporation during normal incidence low-energy (1keV) Ar$^{+}$ ion bombardment is presented. It has been observed that the incorporation of Fe affects the evolution of the surface topography. The addition of Fe generates pronounced nanopatterns, such as dots, ripples and combinations of dots and ripples. The orientation of the ripple wave vector of the patterns formed is found to be in a direction normal to the Fe flow. The nanoripples with wavelength of the order of 39 nm produced is expected to be the lowest wavelength of the patterns reported on ion-beam-eroded structures under the incorporation of metallic impurities as per our knowledge. From the AFM and GISAXS analysis, it has been confirmed that the ripples formed are asymmetric in nature. The effect of the concentration of the Fe on morphological transition of the patterns has been studied using Rutherford backscattering measurements.

Note: © Springer-Verlag Berlin Heidelberg ; Post referee fulltext in progress; Embargo 12 months from publication

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Contributing Institute(s):

1. Experimentebetreuung PETRA III (FS-PE)
2. DOOR-User (DOOR ; HAS-User)

Research Program(s):

1. 6214 - Nanoscience and Materials for Information Technology (POF3-621) (POF3-621)
2. 6G3 - PETRA III (POF3-622) (POF3-622)
3. INDIA-DESY - INDIA-DESY Collaboration (2020_Join2-INDIA-DESY) (2020_Join2-INDIA-DESY)

Experiment(s):

1. PETRA Beamline P03 (PETRA III)

Appears in the scientific report 2017

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Database coverage:
; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; IF < 5 ; JCR ; Nationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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