Journal Article/Contribution to a conference proceedings/Contribution to a book

PUBDB-2025-03759

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Scanning X-ray Microscopy Based on MEMS Technology

Schropp, A. (Corresponding author)XFEL.EU*DESY* ; Wiljes, P.DESY* ; Doehrmann, R.DESY* ; Sow, C.Extern*DESY* ; Garrevoet, J.DESY* ; Schroer, C.XFEL.EU*DESY* ; Wysocki, L.Extern* ; Gu-Stoppel

2025
SPIE Bellingham, Wash.

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Please use a persistent id in citations: doi:10.1117/12.3064505

Abstract: Scanning an X-ray nanobeam instead of the sample can be highly advantageous in experimental scenarios where a fast sample movement is not possible, such as in-situ measurements. Here, fast sample scanning is often hampered by a heavy or bulky sample environment. In this contribution, we present first results of an X-ray beam scanning experiment using a multilayer X-ray mirror to deflect a nanofocused X-ray beam created by diamond compound refractive lenses. By slightly tilting this mirror within the angular acceptance range of the multilayer, a nanofocused X-ray beam was scanned in horizontal direction by 28 µm in the focal plane of the optics. This tilting is driven by an underlying biaxial micro-electromechanical system (MEMS) that can be rapidly steered. The performance of this X-ray MEMS mirror and its influence on the focusing properties of the X-ray beam will be presented.

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Contributing Institute(s):

1. FS-PETRA (FS-PETRA)
2. PETRA-S (FS-PETRA-S)

Research Program(s):

1. 632 - Materials – Quantum, Complex and Functional Materials (POF4-632) (POF4-632)
2. 6G3 - PETRA III (DESY) (POF4-6G3) (POF4-6G3)

Experiment(s):

1. PETRA Beamline P06 (PETRA III)

Appears in the scientific report 2025

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Database coverage:
; National-Konsortium ; SCOPUS

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