Journal Article

PUBDB-2025-00476

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Demonstration of passive, nonlinear, and active devices on a hybrid photonic platform

Mbonde, H. M. (Corresponding author) ; Hashemi, B. ; Segat Frare, B. L. ; Wildi, T.CFEL*DESY* ; Ahmadi, P. T. ; Bonneville, D. B. ; Singh, N.CFEL*DESY* ; Mascher, P. ; Kärtner, F. X.CFEL*XFEL.EU*DESY* ; Herr, T.CFEL*DESY* ; Bradley, J. D. B. (Corresponding author)

2025
Optica Washington, DC

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Please use a persistent id in citations: doi:10.1364/OE.546052

Abstract: The monolithic fabrication of passive, nonlinear, and active functionalities on asingle chip is highly desired in the wake of the development and commercialization of integratedphotonic platforms. However, the co-integration of diverse functionalities has been challengingas each platform is optimized for specific applications, typically requiring different structuresand fabrication flows. In this article, we report on a monolithic and complementary metal-oxidesemiconductor CMOS-compatible hybrid wafer-scale photonics platform that is suitable for linear,nonlinear, and active photonics based on moderate confinement 0.4-µm-thick Si3N4 waveguidinglayer coated with a ∼0.4-µm thick TeO2 film. This platform offers four main advantages, whichare (1) ensuring reduced stress and film cracking for scalable fabrication by using thin Si3N4, (2)allowing polarization-insensitive single-mode operation at telecom wavelengths, (3) enhancingwaveguide nonlinearity and allowing dispersion engineering by adding the TeO2 film coating,and (4) achieving amplification and lasing through incorporation of rare-earth dopants during theTeO2 film deposition step. We present the design and experimental measurement of TeO2-coated∼0.4-µm-thick Si3N4 microring resonators with internal Q factors of 7.5 × 105and 5.2 × 105forTE and TM polarizations, respectively. The experimental results show that the dispersion ofTeO2-coated ∼0.4-µm-thick Si3N4 waveguides can be engineered between normal and anomalousby adjusting the thickness of the TeO2 layer. For a 1.6-µm wide, 500 µm bend radius ring resonatorwith a ∼0.4-µm-thick TeO2 coating, anomalous dispersion values of 25 and 78 ps/nm·km weremeasured at 1552 nm wavelength for the TE and TM-modes, respectively, and the onset of Kerrcomb generation was observed. Also, by applying an Er-doped TeO2 coating, an optical amplifierwith TE and TM net gain and 5.5 dB net internal gain at 1533 nm in a 6.7-cm-long waveguideand a microdisk laser were demonstrated. These results show a promising route to monolithicintegration of passive, nonlinear, and active functionalities via hybrid waveguides on standardsilicon photonic platforms

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Contributing Institute(s):

1. Ultrafast Lasers & X-rays Division (FS-CFEL-2)

Research Program(s):

1. 631 - Matter – Dynamics, Mechanisms and Control (POF4-631) (POF4-631)
2. FEMTOCHIP - FEMTOSECOND LASER ON A CHIP (965124) (965124)

Experiment(s):

1. Experiments at CFEL

Appears in the scientific report 2025

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