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@ARTICLE{Mbonde:622782,
author = {Mbonde, Hamidu M. and Hashemi, Batoul and Segat Frare,
Bruno L. and Wildi, Thibault and Ahmadi, Pooya Torab and
Bonneville, Dawson B. and Singh, Neetesh and Mascher, Peter
and Kärtner, Franz X. and Herr, Tobias and Bradley,
Jonathan D. B.},
title = {{D}emonstration of passive, nonlinear, and active devices
on a hybrid photonic platform},
journal = {Optics express},
volume = {33},
number = {2},
issn = {1094-4087},
address = {Washington, DC},
publisher = {Optica},
reportid = {PUBDB-2025-00476},
pages = {1836 - 1847},
year = {2025},
note = {Waiting for fulltext},
abstract = {The monolithic fabrication of passive, nonlinear, and
active functionalities on asingle chip is highly desired in
the wake of the development and commercialization of
integratedphotonic platforms. However, the co-integration of
diverse functionalities has been challengingas each platform
is optimized for specific applications, typically requiring
different structuresand fabrication flows. In this article,
we report on a monolithic and complementary
metal-oxidesemiconductor CMOS-compatible hybrid wafer-scale
photonics platform that is suitable for linear,nonlinear,
and active photonics based on moderate confinement
0.4-µm-thick Si3N4 waveguidinglayer coated with a
∼0.4-µm thick TeO2 film. This platform offers four main
advantages, whichare (1) ensuring reduced stress and film
cracking for scalable fabrication by using thin Si3N4,
(2)allowing polarization-insensitive single-mode operation
at telecom wavelengths, (3) enhancingwaveguide nonlinearity
and allowing dispersion engineering by adding the TeO2 film
coating,and (4) achieving amplification and lasing through
incorporation of rare-earth dopants during theTeO2 film
deposition step. We present the design and experimental
measurement of TeO2-coated∼0.4-µm-thick Si3N4 microring
resonators with internal Q factors of 7.5 × 105and 5.2 ×
105forTE and TM polarizations, respectively. The
experimental results show that the dispersion ofTeO2-coated
∼0.4-µm-thick Si3N4 waveguides can be engineered between
normal and anomalousby adjusting the thickness of the TeO2
layer. For a 1.6-µm wide, 500 µm bend radius ring
resonatorwith a ∼0.4-µm-thick TeO2 coating, anomalous
dispersion values of 25 and 78 ps/nm·km weremeasured at
1552 nm wavelength for the TE and TM-modes, respectively,
and the onset of Kerrcomb generation was observed. Also, by
applying an Er-doped TeO2 coating, an optical amplifierwith
TE and TM net gain and 5.5 dB net internal gain at 1533 nm
in a 6.7-cm-long waveguideand a microdisk laser were
demonstrated. These results show a promising route to
monolithicintegration of passive, nonlinear, and active
functionalities via hybrid waveguides on standardsilicon
photonic platforms},
cin = {FS-CFEL-2},
ddc = {530},
cid = {I:(DE-H253)FS-CFEL-2-20120731},
pnm = {631 - Matter – Dynamics, Mechanisms and Control
(POF4-631) / FEMTOCHIP - FEMTOSECOND LASER ON A CHIP
(965124)},
pid = {G:(DE-HGF)POF4-631 / G:(EU-Grant)965124},
experiment = {EXP:(DE-H253)CFEL-Exp-20150101},
typ = {PUB:(DE-HGF)16},
pubmed = {39876346},
UT = {WOS:001420799700008},
doi = {10.1364/OE.546052},
url = {https://bib-pubdb1.desy.de/record/622782},
}