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BMBF-13N16678

Milliwatt-level efficient gas harmonic EUV source (MEGA-EUV) Multi-pass cell development for post-compression and spectral tuning

CoordinatorHeyl, Christoph
Grant period2023-12-01 - 2026-11-30
Funding bodyBundesministerium für Bildung und Forschung
 BMBF
IdentifierG:(DE-H253)BMBF-13N16678

Note: DESY is cooperating with Class 5 Photonics, the University of Hamburg, Amphos and partners from the semiconductor industry as part of the "MEGA-EUV" project. The aim of the project is to develop a high-performance, extreme ultraviolet (EUV) beam source that will achieve up to a 1000-fold increase in throughput for the inspection of microchips.
 

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http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Journal Article  ;  ;  ;  ;  ;  ;  ;  ;
Improved temporal characteristics for post-compressed pulses via application-tailored nonlinear polarization ellipse rotation
Optics letters 49(23), 6841 () [10.1364/OL.539646]  GO OpenAccess  Download fulltext Files BibTeX | EndNote: XML, Text | RIS

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 Record created 2024-12-01, last modified 2024-12-01
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