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BMBF-13N16678

Milliwatt-level efficient gas harmonic EUV source (MEGA-EUV) Multi-pass cell development for post-compression and spectral tuning

CoordinatorHeyl, Christoph
Grant period2023-12-01 - 2026-11-30
Funding bodyBundesministerium für Bildung und Forschung
 BMBF
IdentifierG:(DE-H253)BMBF-13N16678

Note: DESY is cooperating with Class 5 Photonics, the University of Hamburg, Amphos and partners from the semiconductor industry as part of the "MEGA-EUV" project. The aim of the project is to develop a high-performance, extreme ultraviolet (EUV) beam source that will achieve up to a 1000-fold increase in throughput for the inspection of microchips.
 

Recent Publications

All known publications ...
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http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Contribution to a conference proceedings/Journal Article  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;
XUV generation with MPC and OPCPA drivers
Nonlinear Frequency Generation and Conversion: Materials and Devices XXIV, San FranciscoSan Francisco, United States, 25 Jan 2025 - 31 Jan 20252025-01-252025-01-31 Proceedings of SPIE 13347, 133470G () [10.1117/12.3041710]  GO Embargoed OpenAccess  Download fulltext Files  Download fulltextFulltext BibTeX | EndNote: XML, Text | RIS

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Poster  ;  ;  ;  ;
Combining high temporal pulse quality and high compression factors via post-compression with chirped ellipse rotation
Ultrafast Optics XIV, AzoresAzores, Portugal, 5 Oct 2025 - 10 Oct 20252025-10-052025-10-10  GO  Download fulltext Files BibTeX | EndNote: XML, Text | RIS

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Poster  ;  ;  ;  ;  ;  ;
Optical Parametric Multi-Pass Cell Amplifier: A High-Efficiency Ultrashort Pulse Amplification scheme
Ultrafast Optics XIV, UFO XIV, AzoresAzores, Portugal, 5 Oct 2025 - 10 Oct 20252025-10-052025-10-10  GO  Download fulltext Files BibTeX | EndNote: XML, Text | RIS

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Contribution to a conference proceedings/Contribution to a book  ;  ;  ;  ;  ;  ;
The Optical Parametric Multi-Pass Cell Amplifier—An Ultrashort Pulse Amplification Scheme with Superior Efficiency and Pulse Quality
[Ebook] CLEO: Science and Innovations : part of Conference on Lasers & Electro-Optics : 4-9 May 2025, Long Beach, California, United States / Optica Publishing Group , [Washington, DC, USA] : Optica Publishing Group, [2025],
CLEO: Science and Innovations, Long BeachLong Beach, California, 4 May 2025 - 9 May 20252025-05-042025-05-09 [Washington, DC, USA] : Optica Publishing Group Washington, D.C., Technical digest series / Optica Publishing Group 2 pp. () [10.1364/CLEO_SI.2025.SS147_3]  GO  Download fulltext Files BibTeX | EndNote: XML, Text | RIS

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Journal Article  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;
Post-compression of a Q-switched laser in a glass-rod multi-pass cell
JPhys photonics 8(1), 015013 () [10.1088/2515-7647/ae1fc4]  GO OpenAccess  Download fulltext Files BibTeX | EndNote: XML, Text | RIS

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Contribution to a conference proceedings/Contribution to a book  ;  ;  ;
Post-Compression with Enhanced Temporal Pulse Quality via Chirped Ellipse Rotation

2025 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, (CLEO/Europe-EQEC), MunichMunich, Germany, 23 Jun 2025 - 27 Jun 20252025-06-232025-06-27 [Piscataway, NJ] : IEEE 1 pp. () [10.1109/cleo/europe-eqec65582.2025.11110933]  GO  Download fulltext Files BibTeX | EndNote: XML, Text | RIS

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Contribution to a conference proceedings/Contribution to a book  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;
High Repetition Rate, High Average Power XUV Sources Based on High Harmonic Generation
[Ebook] 2025 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) : 23-27 June 2025 : conference location: Munich, Germany / , [Piscataway, NJ] : IEEE, 2025,
2025 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, (CLEO/Europe-EQEC), MunichMunich, Germany, 23 Jun 2025 - 27 Jun 20252025-06-232025-06-27 [Piscataway, NJ] : IEEE 1 pp. () [10.1109/cleo/europe-eqec65582.2025.11111538]  GO  Download fulltext Files BibTeX | EndNote: XML, Text | RIS

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Contribution to a conference proceedings/Contribution to a book  ;  ;  ;  ;  ;  ;
Efficient Few-Cycle Pulse Amplification Using an Optical Parametric Multi-Pass Cell Amplifier
[Ebook] 2025 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) : 23-27 June 2025 : conference location: Munich, Germany / , [Piscataway, NJ] : IEEE, 2025,
2025 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference, (CLEO/Europe-EQEC), MunichMunich, Germany, 23 Jun 2025 - 27 Jun 20252025-06-232025-06-27 [Piscataway, NJ] : IEEE 1 pp. () [10.1109/cleo/europe-eqec65582.2025.11111620]  GO  Download fulltext Files BibTeX | EndNote: XML, Text | RIS

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Preprint  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;  ;
Post-compression of a Q-switched laser in a glass-rod multi-pass cell
[10.3204/PUBDB-2025-02624]  GO OpenAccess  Download fulltext Files  Download fulltextFulltext by arXiv.org BibTeX | EndNote: XML, Text | RIS

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Journal Article  ;  ;  ;  ;  ;  ;  ;  ;
Improved temporal characteristics for post-compressed pulses via application-tailored nonlinear polarization ellipse rotation
Optics letters 49(23), 6841 () [10.1364/OL.539646]  GO OpenAccess  Download fulltext Files BibTeX | EndNote: XML, Text | RIS

All known publications ...
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 Record created 2024-12-01, last modified 2024-12-01
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