TY  - CONF
AU  - Manschwetus, Bastian
AU  - Braatz, Thomas
AU  - Starosielec, Sebastian
AU  - Rajhans, Supriya
AU  - Escoto, Esmerando
AU  - Sumfleth, Malte
AU  - Laumer, Dominic
AU  - Goudarzi, Hossein
AU  - Heyl, Christoph M.
AU  - Wieland, Marek
AU  - Prandolini, Mark J.
AU  - Gorkhover, Tais
AU  - Drescher, Markus
AU  - Schulz, Michael
AU  - Riedel, Robert
TI  - High Repetition Rate, High Average Power XUV Sources Based on High Harmonic Generation
CY  - [Piscataway, NJ]
PB  - IEEE
M1  - PUBDB-2025-05002
SN  - 979-8-3315-1252-1
SP  - 1
PY  - 2025
N1  - Literaturangaben;
AB  - High harmonic generation (HHG) sources [1] provide fully coherent laser-like radiation in the Extreme-Ultraviolett (EUV/XUV) and soft-Xray spectral range with femto- or attosecond pulse duration. These sources are ideal metrology tools in scientific or industrial applications: The short wavelength allows very high spatial resolution in scattering or imaging of nanostructures created by state-of-the-art microchip EUV lithography. Their spectral bandwidth and ultrashort pulse durations are very useful in ultrafast spectroscopy to investigate the fast reactions occurring in solar cells, catalysis or to observe directly the carrier dynamics in superconductors or next generation semiconductors. For all these applications, HHG sources with high repetition rates and high average powers are required to minimize the acquisition times, leading to a fast turnaround in sample characterization. At the same time, a high robustness and stability of the source is needed for low -maintenance operation with minimal down times. Based on robust high-power femtosecond Ytterbium (Yb) laser systems together with the multipass cell pulse post compression technology [2], Class 5 Photonics is developing the Moonlander high harmonic generation source to fulfill these requirements.
T2  - 2025 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference
CY  - 23 Jun 2025 - 27 Jun 2025, Munich (Germany)
Y2  - 23 Jun 2025 - 27 Jun 2025
M2  - Munich, Germany
LB  - PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
DO  - DOI:10.1109/cleo/europe-eqec65582.2025.11111538
UR  - https://bib-pubdb1.desy.de/record/641271
ER  -