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@INPROCEEDINGS{Manschwetus:641271,
      author       = {Manschwetus, Bastian and Braatz, Thomas and Starosielec,
                      Sebastian and Rajhans, Supriya and Escoto, Esmerando and
                      Sumfleth, Malte and Laumer, Dominic and Goudarzi, Hossein
                      and Heyl, Christoph M. and Wieland, Marek and Prandolini,
                      Mark J. and Gorkhover, Tais and Drescher, Markus and Schulz,
                      Michael and Riedel, Robert},
      title        = {{H}igh {R}epetition {R}ate, {H}igh {A}verage {P}ower {XUV}
                      {S}ources {B}ased on {H}igh {H}armonic {G}eneration},
      address      = {[Piscataway, NJ]},
      publisher    = {IEEE},
      reportid     = {PUBDB-2025-05002},
      isbn         = {979-8-3315-1252-1},
      pages        = {1},
      year         = {2025},
      note         = {Literaturangaben;},
      comment      = {[Ebook] 2025 Conference on Lasers and Electro-Optics Europe
                      $\&$ European Quantum Electronics Conference
                      (CLEO/Europe-EQEC) : 23-27 June 2025 : conference location:
                      Munich, Germany / , [Piscataway, NJ] : IEEE, 2025,},
      booktitle     = {[Ebook] 2025 Conference on Lasers and
                       Electro-Optics Europe $\&$ European
                       Quantum Electronics Conference
                       (CLEO/Europe-EQEC) : 23-27 June 2025 :
                       conference location: Munich, Germany /
                       , [Piscataway, NJ] : IEEE, 2025,},
      abstract     = {High harmonic generation (HHG) sources [1] provide fully
                      coherent laser-like radiation in the Extreme-Ultraviolett
                      (EUV/XUV) and soft-Xray spectral range with femto- or
                      attosecond pulse duration. These sources are ideal metrology
                      tools in scientific or industrial applications: The short
                      wavelength allows very high spatial resolution in scattering
                      or imaging of nanostructures created by state-of-the-art
                      microchip EUV lithography. Their spectral bandwidth and
                      ultrashort pulse durations are very useful in ultrafast
                      spectroscopy to investigate the fast reactions occurring in
                      solar cells, catalysis or to observe directly the carrier
                      dynamics in superconductors or next generation
                      semiconductors. For all these applications, HHG sources with
                      high repetition rates and high average powers are required
                      to minimize the acquisition times, leading to a fast
                      turnaround in sample characterization. At the same time, a
                      high robustness and stability of the source is needed for
                      low -maintenance operation with minimal down times. Based on
                      robust high-power femtosecond Ytterbium (Yb) laser systems
                      together with the multipass cell pulse post compression
                      technology [2], Class 5 Photonics is developing the
                      Moonlander high harmonic generation source to fulfill these
                      requirements.},
      month         = {Jun},
      date          = {2025-06-23},
      organization  = {2025 Conference on Lasers and
                       Electro-Optics Europe $\&$ European
                       Quantum Electronics Conference, Munich
                       (Germany), 23 Jun 2025 - 27 Jun 2025},
      cin          = {FS-PRI},
      cid          = {I:(DE-H253)FS-PRI-20240109},
      pnm          = {631 - Matter – Dynamics, Mechanisms and Control
                      (POF4-631) / BMBF-13N16678 - Milliwatt-level efficient gas
                      harmonic EUV source (MEGA-EUV) Multi-pass cell development
                      for post-compression and spectral tuning (BMBF-13N16678)},
      pid          = {G:(DE-HGF)POF4-631 / G:(DE-H253)BMBF-13N16678},
      experiment   = {EXP:(DE-MLZ)NOSPEC-20140101},
      typ          = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
      doi          = {10.1109/cleo/europe-eqec65582.2025.11111538},
      url          = {https://bib-pubdb1.desy.de/record/641271},
}