Journal Article

PUBDB-2021-01954

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Planar refractive lenses made of SiC for high intensity nanofocusing

Lyubomirskiy, M. (Corresponding author)DESY* ; Schurink, B. ; Makhotkin, I. A.Extern* ; Brueckner, D.DESY* ; Wittwer, F.XFEL.EU*DESY* ; Kahnt, M.Extern* ; Seyrich, M.Extern*XFEL.EU*DESY* ; Seiboth, F.DESY* ; Bijkerk, F.Extern* ; Schroer, C. G.DESY*

2021
Soc. Washington, DC

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Please use a persistent id in citations: doi:10.1364/OE.416223  doi:10.3204/PUBDB-2021-01954

Abstract: We report on the manufacturing and testing of the first nanofocusing refractive lenses made of single-crystal silicon carbide. We introduce the fabrication process based on lithography, followed by deep isotropic etching. The lenses were characterized at the energy of 12 keV at the beamline P06 of the synchrotron radiation source PETRA III. A focal spot of 186 nm×275 nm has been achieved with a lens working distance of 29 mm.

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Contributing Institute(s):

1. FS-PETRA (FS-PETRA)
2. DOOR-User (DOOR ; HAS-User)

Research Program(s):

1. 632 - Materials – Quantum, Complex and Functional Materials (POF4-632) (POF4-632)
2. 6G3 - PETRA III (DESY) (POF4-6G3) (POF4-6G3)
3. DFG project 426888090 - SFB 1441: Verfolgung der aktiven Zentren in heterogenen Katalysatoren für die Emissionskontrolle (TrackAct) (426888090) (426888090)

Experiment(s):

1. PETRA Beamline P06 (PETRA III)

Appears in the scientific report 2021

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