Journal Article

PUBDB-2019-00791

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Development and characterization of sub-monolayer coatings as novel calibration samples for X-ray spectroscopy

Hönicke, P. (Corresponding author)Extern* ; Krämer, M. ; Lühl, L.Extern* ; Andrianov, K.Extern* ; Beckhoff, B.Extern* ; Dietsch, R. ; Holz, T. ; Kanngießer, B.Extern* ; Weißbach, D. ; Wilhein, T.Extern*

2018
Elsevier Amsterdam [u.a.]

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Please use a persistent id in citations: doi:10.1016/j.sab.2018.04.001

Abstract: With the advent of both modern X-ray fluorescence (XRF) methods and improved analytical reliability requirements the demand for suitable reference samples has increased. Especially in nanotechnology with the very low areal mass depositions, quantification becomes considerably more difficult. However, the availability of suited reference samples is drastically lower than the demand. Physical vapor deposition techniques have been enhanced significantly in the last decade driven by the need for extremely precise film parameters in multilayer production. We have applied those techniques for the development of layer-like reference samples with mass depositions in the ng-range and well below for Ca, Cu, Pb, Mo, Pd, Pb, La, Fe and Ni. Numerous other elements would also be possible. Several types of reference samples were fabricated: multi-elemental layer and extremely low (sub-monolayer) samples for various applications in XRF and total-reflection XRF analysis. Those samples were characterized and compared at three different synchrotron radiation beamlines at the BESSY II electron storage ring employing the reference-free XRF approach based on physically calibrated instrumentation. In addition, the homogeneity of the multi-elemental coatings was checked at the P04 beamline at DESY. The measurements demonstrate the high precision achieved in the manufacturing process as well as the versatility of application fields for the presented reference samples.

Note: © Elsevier B.V.; Final published version in progress; Post referee fulltext in progress; Embargo 12 months from publication

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Contributing Institute(s):

1. DOOR-User (DOOR)

Research Program(s):

1. 6G3 - PETRA III (POF3-622) (POF3-622)

Experiment(s):

1. PETRA Beamline P04 (PETRA III)

Appears in the scientific report 2018

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Database coverage:
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