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X-ray reflectometric investigation of surface roughnes of SiC substrate wafers and its influence on the structural perfection of the deposited SiC epitaxial layers
Mazur, K. ; Wierzchowski, W. ; Wieteska, K. ; Hofman, W. ; Kosciewicz, K. ; Strupinski, W. ; Geaeff, W. ; DESY
2009
20098th National Meeting of Synchrotron Radiation Users, KSUPS-8, PodlesicePodlesice, Poland, 24 Sep 2009 - 26 Sep 20092009-09-242009-09-26
Contributing Institute(s):
- Experiments with synchrotron radiation (HASYLAB)
Research Program(s):
- DORIS Beamline E2 (POF1-550) (POF1-550)
- DORIS Beamline F1 (POF1-550) (POF1-550)
- FS-Proposal: II-20060165 EC (II-20060165-EC) (II-20060165-EC)
Experiment(s):
- DORIS Beamline E2 (DORIS III)
- DORIS Beamline F1 (DORIS III)
Appears in the scientific report
2009
Database coverage:No Author Disambiguation