%0 Conference Paper
%A Mazur, K.
%A Wierzchowski, W.
%A Wieteska, K.
%A Hofman, W.
%A Kosciewicz, K.
%A Strupinski, W.
%A Geaeff, W.
%A DESY
%T X-ray reflectometric investigation of surface roughnes of SiC substrate wafers and its influence on the structural perfection of the deposited SiC epitaxial layers
%M PHPPUBDB-10679
%D 2009
%B 8th National Meeting of Synchrotron Radiation Users
%C 24 Sep 2009 - 26 Sep 2009, Podlesice (Poland)
Y2 24 Sep 2009 - 26 Sep 2009
M2 Podlesice, Poland
%F PUB:(DE-HGF)31
%9 Talk (non-conference)
%U https://bib-pubdb1.desy.de/record/87983