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@ARTICLE{Deyu:625722,
      author       = {Deyu, Getnet Kacha and Wenskat, Marc and Gonzalez
                      Diaz-Palacio, Isabel and Blick, Robert and Zierold, Robert
                      and Hillert, Wolfgang},
      title        = {{R}ecent advances in atomic layer deposition of
                      superconductingthin films: a review},
      journal      = {Materials Horizons},
      volume       = {12},
      number       = {15},
      issn         = {2051-6347},
      address      = {Cambridge},
      publisher    = {RSC Publ.},
      reportid     = {PUBDB-2025-01180},
      pages        = {5594 - 5626},
      year         = {2025},
      abstract     = {The development of superconducting thin films has opened
                      new avenues in electronic and quantumtechnologies, offering
                      potential breakthroughs in performance due to their unique
                      properties such aszero electrical DC resistance and perfect
                      diamagnetism. Atomic Layer Deposition (ALD) has emergedas a
                      promising technique for fabricating these films with high
                      precision and uniformity. This reviewexplores the role of
                      ALD in the production of superconducting thin films,
                      detailing the fundamentalsof both superconductors and the
                      ALD process, and discussing the various materials and
                      techniquesused. It also examines the existing and potential
                      applications of these films and considers futureprospects
                      and challenges in the field.},
      cin          = {MSL},
      ddc          = {540},
      cid          = {I:(DE-H253)MSL-20170609},
      pnm          = {621 - Accelerator Research and Development (POF4-621) /
                      05H21GURB2 - Verbundprojekt 05H2021 - $R\&D$ BESCHLEUNIGER
                      (TOSCA): Neue Ansätze zur Messung und Modellierung der
                      Oberflächeneigenschaften supraleitender Resonatoren
                      (BMBF-05H21GURB2) / 05K22GUD - Verbundprojekt 05K2022 -
                      NOVALIS: Innovative Beschleunigertechnologien für
                      effiziente Strahlungsquellen. Teilprojekt 1.
                      (BMBF-05K22GUD)},
      pid          = {G:(DE-HGF)POF4-621 / G:(DE-Ds200)BMBF-05H21GURB2 /
                      G:(DE-Ds200)BMBF-05K22GUD},
      experiment   = {EXP:(DE-MLZ)NOSPEC-20140101},
      typ          = {PUB:(DE-HGF)16},
      doi          = {10.1039/D5MH00323G},
      url          = {https://bib-pubdb1.desy.de/record/625722},
}