Early-stage silver growth during sputter deposition on SiO$_2$ and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS

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Early-stage silver growth during sputter deposition on SiO$_2$ and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS - PUBDB-2024-06440

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