TY  - JOUR
AU  - Dort, Katharina
AU  - Ballabriga, Rafael
AU  - Braach, Justus
AU  - Buschmann, Eric
AU  - Campbell, Michael
AU  - Dannheim, Dominik
AU  - Huth, Lennart
AU  - Kremastiotis, Iraklis
AU  - Kroeger, Jens
AU  - Linssen, Lucie
AU  - Munker, Magdalena
AU  - Snoeys, Walter
AU  - Spannagel, Simon
AU  - Švihra, Peter
AU  - Vanat, Tomas
TI  - Comparison of different sensor thicknesses and substrate materials for themonolithic small collection-electrode technology demonstrator CLICTD
JO  - Nuclear instruments & methods in physics research / A
VL  - 1041
IS  - arXiv:2204.10569
SN  - 0168-9002
CY  - Amsterdam
PB  - North-Holland Publ. Co.
M1  - PUBDB-2022-01487
M1  - arXiv:2204.10569
SP  - 167413 -
PY  - 2022
AB  - Small collection-electrode monolithic CMOS sensors profit from a high signal-to-noise ratio and a small power consumption, but have a limited active sensor volume due to the fabrication process based on thin high-resistivity epitaxial layers. In this paper, the active sensor depth is investigated in the monolithic small collection-electrode technology demonstrator CLICTD. Charged particle beams are used to study the charge-collection properties and the performance of devices with different thicknesses both for perpendicular and inclined particle incidence. In CMOS sensors with a high-resistivity Czochralski substrate, the depth of the sensitive volume is found to increase by a factor two in comparison with standard epitaxial material and leads to significant improvements in the hit-detection efficiency and the spatial and time resolution.
KW  - High-resistivity Czochralski silicon (autogen)
KW  - Inclined particle tracks (autogen)
KW  - Monolithic silicon sensor (autogen)
KW  - Small collection-electrode design (autogen)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000862585900006
DO  - DOI:10.1016/j.nima.2022.167413
UR  - https://bib-pubdb1.desy.de/record/475889
ER  -