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@ARTICLE{Gudat:429164,
      author       = {Gudat, Wolfgang},
      title        = {{S}oft {X}-ray microscopy and lithography with synchrotron
                      radiation},
      journal      = {Nuclear instruments $\&$ methods in physics research},
      volume       = {152},
      number       = {1},
      issn         = {0029-554X},
      address      = {Amsterdam},
      publisher    = {Elsevier},
      reportid     = {PUBDB-2019-04833},
      pages        = {279 - 288},
      year         = {1978},
      abstract     = {Considerable progress in microscopy techniques with soft
                      X-ray radiation has been achieved in particular through the
                      application of synchrotron radiation. Various methods which
                      are currently being studied theoretically or already being
                      used practically will be described briefly. Attention is
                      focused on the method of contact microscopy. Various
                      biological specimens have been investigated by this method
                      with a resolution as good as 100 Å. X-ray lithography which
                      in the technical procedure is very similar to contact
                      microscopy gives promise for the fabrication of high quality
                      submicron structure in electronic device production.
                      Important factors limiting the resolution and determining
                      the performance of contact microscopy and X-ray lithography
                      will be discussed.},
      cin          = {L},
      ddc          = {530},
      cid          = {I:(DE-H253)L-20120731},
      pnm          = {899 - ohne Topic (POF3-899)},
      pid          = {G:(DE-HGF)POF3-899},
      experiment   = {EXP:(DE-MLZ)NOSPEC-20140101},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:A1978FC65200054},
      doi          = {10.1016/0029-554X(78)90280-X},
      url          = {https://bib-pubdb1.desy.de/record/429164},
}