000429164 001__ 429164
000429164 005__ 20250813100058.0
000429164 0247_ $$2doi$$a10.1016/0029-554X(78)90280-X
000429164 0247_ $$2ISSN$$a0029-554x
000429164 0247_ $$2ISSN$$a0167-5087
000429164 0247_ $$2ISSN$$a1872-9606
000429164 0247_ $$2altmetric$$aaltmetric:41539697
000429164 0247_ $$2WOS$$aWOS:A1978FC65200054
000429164 0247_ $$2openalex$$aopenalex:W1971889332
000429164 037__ $$aPUBDB-2019-04833
000429164 082__ $$a530
000429164 1001_ $$aGudat, Wolfgang$$b0$$udesy
000429164 245__ $$aSoft X-ray microscopy and lithography with synchrotron radiation
000429164 260__ $$aAmsterdam$$bElsevier$$c1978
000429164 3367_ $$2DRIVER$$aarticle
000429164 3367_ $$2DataCite$$aOutput Types/Journal article
000429164 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1575896722_14321
000429164 3367_ $$2BibTeX$$aARTICLE
000429164 3367_ $$2ORCID$$aJOURNAL_ARTICLE
000429164 3367_ $$00$$2EndNote$$aJournal Article
000429164 520__ $$aConsiderable progress in microscopy techniques with soft X-ray radiation has been achieved in particular through the application of synchrotron radiation. Various methods which are currently being studied theoretically or already being used practically will be described briefly. Attention is focused on the method of contact microscopy. Various biological specimens have been investigated by this method with a resolution as good as 100 Å. X-ray lithography which in the technical procedure is very similar to contact microscopy gives promise for the fabrication of high quality submicron structure in electronic device production. Important factors limiting the resolution and determining the performance of contact microscopy and X-ray lithography will be discussed.
000429164 536__ $$0G:(DE-HGF)POF3-899$$a899 - ohne Topic (POF3-899)$$cPOF3-899$$fPOF III$$x0
000429164 588__ $$aDataset connected to CrossRef
000429164 693__ $$0EXP:(DE-MLZ)NOSPEC-20140101$$5EXP:(DE-MLZ)NOSPEC-20140101$$eNo specific instrument$$x0
000429164 773__ $$0PERI:(DE-600)2205648-8$$a10.1016/0029-554X(78)90280-X$$gVol. 152, no. 1, p. 279 - 288$$n1$$p279 - 288$$tNuclear instruments & methods in physics research$$v152$$x0029-554X$$y1978
000429164 8564_ $$uhttps://bib-pubdb1.desy.de/record/429164/files/10.1016_0029-554X%2878%2990280-X.pdf$$yRestricted
000429164 8564_ $$uhttps://bib-pubdb1.desy.de/record/429164/files/10.1016_0029-554X%2878%2990280-X.gif?subformat=icon$$xicon$$yRestricted
000429164 8564_ $$uhttps://bib-pubdb1.desy.de/record/429164/files/10.1016_0029-554X%2878%2990280-X.jpg?subformat=icon-1440$$xicon-1440$$yRestricted
000429164 8564_ $$uhttps://bib-pubdb1.desy.de/record/429164/files/10.1016_0029-554X%2878%2990280-X.jpg?subformat=icon-180$$xicon-180$$yRestricted
000429164 8564_ $$uhttps://bib-pubdb1.desy.de/record/429164/files/10.1016_0029-554X%2878%2990280-X.jpg?subformat=icon-640$$xicon-640$$yRestricted
000429164 8564_ $$uhttps://bib-pubdb1.desy.de/record/429164/files/10.1016_0029-554X%2878%2990280-X.pdf?subformat=pdfa$$xpdfa$$yRestricted
000429164 909CO $$ooai:bib-pubdb1.desy.de:429164$$pVDB
000429164 9101_ $$0I:(DE-588b)2008985-5$$6P:(DE-HGF)0$$aDeutsches Elektronen-Synchrotron$$b0$$kDESY
000429164 9131_ $$0G:(DE-HGF)POF3-899$$1G:(DE-HGF)POF3-890$$2G:(DE-HGF)POF3-800$$3G:(DE-HGF)POF3$$4G:(DE-HGF)POF$$aDE-HGF$$bProgrammungebundene Forschung$$lohne Programm$$vohne Topic$$x0
000429164 9201_ $$0I:(DE-H253)L-20120731$$kL$$lBibliothek und Dokumentation$$x0
000429164 980__ $$ajournal
000429164 980__ $$aVDB
000429164 980__ $$aI:(DE-H253)L-20120731