% IMPORTANT: The following is UTF-8 encoded.  This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.

@ARTICLE{Parfeniukas:315025,
      author       = {Parfeniukas, Karolis and Rahomäki, Jussi and Giakoumidis,
                      Stylianos and Seiboth, Frank and Wittwer, Felix and Schroer,
                      Christian and Vogt, Ulrich},
      title        = {{I}mproved tungsten nanofabrication for hard {X}-ray zone
                      plates},
      journal      = {Microelectronic engineering},
      volume       = {152},
      issn         = {0167-9317},
      address      = {[S.l.]},
      publisher    = {Elsevier},
      reportid     = {PUBDB-2016-05566},
      pages        = {6 - 9},
      year         = {2016},
      abstract     = {We present an improved nanofabrication method of high
                      aspect ratio tungsten structures for use in high efficiency
                      nanofocusing hard X-ray zone plates. A ZEP 7000 electron
                      beam resist layer used for patterning is cured by a second,
                      much larger electron dose after development. The curing step
                      improves pattern transfer fidelity into a chromium hard mask
                      by reactive ion etching using Cl2/O2 chemistry. The pattern
                      can then be transferred into an underlying tungsten layer by
                      another reactive ion etching step using SF6/O2. A 630
                      nm-thick tungsten zone plate with smallest line width of 30
                      nm was fabricated using this method and characterized. At
                      8.2 keV photon energy the device showed an efficiency of
                      $2.2\%$ with a focal spot size at the diffraction limit,
                      measured at Diamond Light Source I-13-1 beamline.},
      cin          = {FS-PETRA},
      ddc          = {620},
      cid          = {I:(DE-H253)FS-PETRA-20140814},
      pnm          = {6214 - Nanoscience and Materials for Information Technology
                      (POF3-621)},
      pid          = {G:(DE-HGF)POF3-6214},
      experiment   = {EXP:(DE-MLZ)External-20140101},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000385991400002},
      doi          = {10.1016/j.mee.2015.12.015},
      url          = {https://bib-pubdb1.desy.de/record/315025},
}