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@ARTICLE{Kuschel:309422,
author = {Kuschel, Olga and Dieck, Florian and Wilkens, Henrik and
Gevers, Sebastian and Rodewald, Jari and Otte, Christian and
Zoellner, Marvin and Niu, Gang and Schroeder, Thomas and
Wollschlaeger, Joachim},
title = {{P}lasma {E}nhanced {C}omplete {O}xidation of {U}ltrathin
{E}pitaxial {P}raseodymia {F}ilms on {S}i(111)},
journal = {Materials},
volume = {8},
number = {9},
issn = {1996-1944},
address = {Basel},
publisher = {MDPI},
reportid = {PUBDB-2016-03808},
pages = {6379 - 6390},
year = {2015},
abstract = {Praseodymia films have been exposed to oxygen plasma at
room temperature after deposition on Si(111) via molecular
beam epitaxy. Different parameters as film thickness,
exposure time and flux during plasma treatment have been
varied to study their influence on the oxygen plasma
oxidation process. The surface near regions have been
investigated by means of X-ray photoelectron spectroscopy
showing that the plasma treatment transforms the
stoichiometry of the films from Pr2O3 to PrO2. Closer
inspection of the bulk properties of the films by means of
synchrotron radiation based X-ray reflectometry and
diffraction confirms this transformation if the films are
thicker than some critical thickness of 6 nm. The layer
distance of these films is extremely small verifying the
completeness of the plasma oxidation process. Thinner films,
however, cannot be transformed completely. For all films,
less oxidized very thin interlayers are detected by these
experimental techniques.},
cin = {DOOR},
ddc = {600},
cid = {I:(DE-H253)HAS-User-20120731},
pnm = {6G3 - PETRA III (POF3-622)},
pid = {G:(DE-HGF)POF3-6G3},
experiment = {EXP:(DE-H253)D-W1-20150101 / EXP:(DE-H253)P-P08-20150101},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000362640300006},
pubmed = {pmid:28793569},
doi = {10.3390/ma8095312},
url = {https://bib-pubdb1.desy.de/record/309422},
}