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@ARTICLE{Fischer:187343,
      author       = {Fischer, G. and Selvadurai, U. and Nellesen, J. and Sprute,
                      T. and Tillmann, W.},
      title        = {{A}nalysis of stress gradients in physical vapour
                      deposition multilayers by {X}-ray diffraction at fixed depth
                      intervals},
      journal      = {Journal of applied crystallography},
      volume       = {47},
      number       = {1},
      issn         = {1600-5767},
      address      = {Copenhagen},
      publisher    = {Munksgaard},
      reportid     = {PUBDB-2014-03878},
      pages        = {335 - 345},
      year         = {2014},
      abstract     = {The objective of this article is to develop and apply a
                      model for the design and evaluation of X-ray diffraction
                      experiments to measure phase-specific residual stress
                      profiles in multilayer systems. Using synchrotron radiation
                      and angle-dispersive diffraction, the stress measurements
                      are performed on the basis of the sin2[psi] method. Instead
                      of the traditional [Omega] or [chi] mode, the experiments
                      are carried out by a simultaneous variation of the
                      goniometer angles [chi], [Omega] and [varphi]G to ensure
                      that the penetration and information depth and the measuring
                      direction [varphi] remain unchanged when the polar angle
                      [psi] is varied. The applicability of this measuring and
                      evaluation strategy is demonstrated by the example of a
                      multilayer system consisting of Ti and TiAlN layers,
                      alternately deposited on a steel substrate by means of
                      physical vapour deposition.},
      cin          = {DOOR},
      ddc          = {540},
      cid          = {I:(DE-H253)HAS-User-20120731},
      pnm          = {DORIS Beamline G3 (POF2-54G13)},
      pid          = {G:(DE-H253)POF2-G3-20130405},
      experiment   = {EXP:(DE-H253)D-G3-20150101},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000330485100042},
      doi          = {10.1107/S1600576713030951},
      url          = {https://bib-pubdb1.desy.de/record/187343},
}